Deep Level Transient Spectroscopy for Semiconductor Device Development

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The requested Deep Level Transient Spectroscopy (DLTS) system will support current and future research activities on the development of semi-conductor devices for scientific and commercial applications. Over forty years in development, the DLTS method is a powerful tool for identifying trapping defects that lead to severe deterioration of the device signal quality. The basic components of a DLTS system are a temperature-controlled cryostat, fast measurement units and a computer-controlled DAQ and analysis system. The ***system will be housed in Carleton University's micro-fabrication facility (CUMFF).******The DLTS system will regularly support the research on semi-conductor devices by groups from Carleton University, the University of Ottawa, the NRC and industry. It will immediately facilitate the collaborative research effort of 4 Carleton Physics Department and 2 Department of Electronics faculty to develop innovative technologies for semi-conductor devices to operate under adverse environmental conditions. This represents a major shift in the Carleton Physics and Electronics Departments research paradigm, places the CUMFF at the center of three international collaborations at CERN and SNOLAB and allows for potential technology applications in space-borne devices, nuclear spallation sources and research reactors and beamlines. The significance of this research is underlined by the funding awarded through 2 CFI-IF, 1 CFREF, 3 NSERC-Discovery and 3 NSERC-RTI subatomic physics grants and by additional funding from CERN and the AIDA-2020 European framework. It also attests to the level of excellence of the signing researchers.******Without a DLTS system this increased research activity will have to be scaled back inevitably undermining our ability to deliver our research program and eventually participate***in future research endeavors at SNOLAB and CERN. Furthermore, the lack of state-of-the-art equipment inhibits the recruitment of top students and severely limits the attractiveness of Carleton's micro-fabrication facility to external research groups to pursue collaborative research. This may place the long-term viability of this important Canadian research investment into question.******As the DLTS system will enable new inquiries and collaborations, it will result to new research capabilities. We expect an average of 12 HQPs per year to utilize the system in the next five years for research or graduate course work. The DLTS system will further enhance the educational value of CUMFF by allowing 50 B.Eng./B.Sc. students per year to receive training as part of their honor's or regular course laboratory projects. Results of the DLTS method are highly publishable in peer-reviewed journals and attract instant attention when presented at conferences. Trained students will have improved job prospects with skillsets particularly desirable in the high-tech industry and in aerospace, defense and communications industries.