A MEMS multi-spectral transducer array

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The objective of the proposed research proposal is to design and fabricate a MEMS based multi-spectral transducer array that is capable of generating and gathering information concurrently in the acoustical and microwave portions of the spectrum. The state-of-the-art in planar and non-planar capacitive micromachined ultrasonic transducer (CMUT) array and MEMS based ultrawideband (UWB) microwave radar will be extended to develop a multi-spectral transducer array that integrates the capabilities of both the non-planar CMUT array and the UWB MEMS radar. While the acoustical imaging using the beamforming and beamsteering capability of the planar or non-planar CMUT array will identify an object or feature in the target area, the microwave imaging using the UWB radar will enable to look inside the object or the feature by generating an image with a much higher resolution and optimum depth compared to that obtained if only the ultrasonic imaging technique is used. A microscale fusion of two different transduction technologies will advance the state-of-the-art in high resolution 3-D imaging that will result in lower cost faster smaller equipment with a higher imaging capability. The transducer array can be used for non-intrusive or non-destructive imaging in diverse applications such as medical diagnostic imaging, automotive collision avoidance, material characterization, and for biometric based identification and security purposes. The transducer's simultaneous acoustical and microwave imaging capability will offer many advantages in medical diagnostic applications that will lead to the earlier diagnosis of medical conditions when they are more readily curable and less costly to treat. The conduct of the research will also contribute to the development of a number of highly qualified persons (HQP). The planned technology transfer initiative should enhance the global competitiveness of Canadian firms participating in collaborative research and innovation partnership.