A Dual-Arm Wafer Robot Handler for Precision Mechatronics and MEMS Characterizations

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The requested equipment is a recently developed automated Dual- Arm Wafer- Handling Robot (DAWHR), which is used to process semiconductor wafers more rapidly (wafers per hour). Semiconductors are used to produce integrated circuits (IC) in the electronics industry. Digital signal processors, microcontrollers, and memory chips are a few examples of the many electrical and electronic devices that use ICs. The requested robot can move wafers between stages and stations with precision and speed. This enables operations like polishing, etching, and implanting to take place. Specifically, two research programs at Memorial University departments of Mechanical Eng and Electrical and Computer Eng require this robot to conduct impactful research. These research programs focus on precision mechatronics for wafer scanner systems and characterizations for piezoMEMS energy harvesters. In the precision mechatronics for wafer scanner systems research program, the main goal is to improve the performance and accuracy of the robots and actuators that run lithography machines (wafer scanners). To enhance the lithography process, the main goal is to design very precise actuators and algorithms for controlling motion. This will let lithography make ICs that are lighter, faster, and smarter. The proposed research has an excellent chance of leading to advanced motion systems, new motion profiles, and better control of the DAWHR wafer scanner system. This will improve the resolution of ICs by reducing positioning errors and speeding up the process. This will lead to the creation of many important new technologies, such as self-driving cars, cell phones, computers, and micro--robotics. The MEMS characterizations research program involves supplying direct current voltage to low power, low voltage small electronic devices, portable commercial vibration based energy harvesting products, like wind energy and ocean wave energy. The DAWHR will support research to characterize and test new microscale vibration energy harvesters that can reliably power small electronic devices, such as sensors in Internet -of -Things applications that are used on land or at sea, in order to solve different industrial renewable energy problems, especially by taking advantage of ambient vibration. The DAWHR is essential for figuring out how new piezoMEMS energy harvesters and printed electronics for power management work and testing them. The requested DAWHR will be installed in the new cleanroom at Memorial University. HQP with research interests in fabrication, polishing, etching, and implanting will have access to the equipment. Using the requested industry -class motion system daily in their thesis work will give the applicants' students, including all designated underrepresented groups, valuable training experience. As a result, the HQP will have a competitive advantage to secure jobs in the high-tech industry with improved research abilities and new practical skills.