Multi-Axis Laser Interferometer for Position Measurements and Motion Feedback Control

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The requested multi-axis laser interferometer is an extremely versatile laboratory inspection tool used for multi-axis position measurement with sub-nanometers accuracy. This tool uses the interferometer laser technology, which offers a non-contact, non-destructive, fast, highly sensitive, and exceptional resolution and accuracy for multi-axis position measurement. The typical applications of this interferometer include optical lithography steppers and scanners, mask and wafer inspection and measurement tools, and measurement and calibration of high resolution or high-frequency mechanical motions within meters range. This industry-level equipment will be the first of its kind in Newfoundland and Labrador as well as in Atlantic Canada. The laser interferometer is crucial to support two research programs: The design of new precision motion systems for the next-generation lithography machines, and microelectromechanical systems (MEMS) based piezoelectric vibration energy harvesting. The main objectives of new precision motion systems are to enhance the precision and to increase the force density of the main motion scanner systems of the future semiconductor manufacturing machines. This would lead to faster, lighter, and smarter integrated circuits. Higher force density will contribute to the enhancement of throughput of the semiconductor manufacturing machines. The main objectives of the MEMS research are the design and optimization of MEMS-based vibration energy harvesters as well as their integration in the microsystems. Low-power electronic applications are normally empowered by batteries with stringent lifetime and size constraints. To enhance operational autonomy, energy harvesting from ambient vibration by MEMS devices has been deemed as a promising solution to this universal problem. The requested laser interferometer will advance HQP skills in the field of precision engineering, which is essential to develop new and improved high-precision processes and machines. This instrument will provide our HQP with the exceptional skills on multi-dimensional sub-nanometer accuracy measurement and motion feedback control for building ultra-precision systems in the context of industry 4.0. The applicants' students, including all the designated underrepresented groups, will obtain valuable training experience through the daily use of the requested industry-class instrument in their thesis/project work. A major outcome of the proposed research activities with the proposed equipment is enhancing the precision of lithography systems, which will lead to fabrication of faster, smarter, and lighter integrated circuits. The advancement of this technology is essential to keep Canada's competitiveness in the advanced manufacturing industry. The piezoelectric material industry in Canada can also benefit by developing a framework that allows the integration of these materials in critical and sensitive nano-positioning applications.