Nanometer-Resolution High-Speed Planar Positioning System

纳米分辨率高速平面定位系统

• 批准号: RTI-2020-00409
• 负责人: AlJanaideh, Mohammad
• 金额: $ 10.93万
• 依托单位: Memorial University of Newfoundland
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=693793
• 关键词: Nanometer; Resolution; Speed; Planar; Positioning

The requested nanometer-Resolution High Speed Planar Positioning (nm-RHSPP) system is a multi-axis motion stage designed with air bearing technology to provide frictionless high-precision positioning in X-Y plane with nanometers accuracy. The nm-RHSPP includes linear motors (three magnetic motors), measuring systems (absolute encoders), air bearing assemblies, an advanced motion control system, and a Granite base. The nm-RHSPP provides 500 mm 500 mm X-Y plane with 1 nm resolution and velocity up to 2 m/s. The motors do not use mechanical components in the drivetrain, and they transmit the drive force to the motion platform without friction. This makes the nm-RHSPP system is suited for high-precision applications, such as inspection systems, laser marking, microscopy, and scanning ******This industrial equipment will be the first of its kind in Canada to provide planar high-precision motion with nanomter accuracy to the users at Memorial University of Newfoundland as well as in the province of Newfoundland and Labrador. The nm-RHSPP is crucial to support two research programs: (i) design of new precision motion systems for the next-generation lithography machines, and (ii) design and optimization of piezoelectric Micro-Electro-Mechanical Systems energy harvesters and microsystems for low-power electronic applications. Each year over 20 students under the applicants' supervision, who will be first trained on the equipment, will use it to conduct various research and academic activities. The students will acquire unique and specialized knowledge and hands-on skills on most recent high-precision high-speed motion systems in the industry of the semi-conductor manufacturing. It is also anticipated to attract researchers from industry in the province of Newfoundland and Labrador.******For the “design of new precision motion systems for the next-generation lithography machines” research, the main objective is to design a self-regulating smart-material-based reticle stage by integrating mutli-axial piezo-nano-positioning actuators to minimize the positioning errors between the main motion systems (reticle stage and wafer stage) in the future semiconductor manufacturing machines. This will lead to sub-nanometer accuracy of the extreme ultraviolet lithography process to manufacture faster, smarter, and lighter integrated circuits for new applications and future challenges, including microprocessors for the connected autonomous car and integrated circuits to enhance the multi-agent nanorobotic systems.For “design and optimization of piezoelectric Micro-Electro-Mechanical Systems energy harvesters and microsystems for low-power electronic applications”, the nm-RHSPP will help to confirm the theoretical studies and numerical simulations by enabling laboratory measurements of the proposed MEMS devices and enhance energy conversion efficiency of the MEMS energy harvesters.********

所要求的纳米分辨率高速平面定位（nm-RHSPP）系统是一个多轴运动平台，采用空气轴承技术设计，可在X-Y平面内提供纳米精度的无摩擦高精度定位。nm-RHSPP包括直线电机（三个磁力电机）、测量系统（绝对值编码器）、空气轴承组件、先进的运动控制系统和花岗岩底座。nm-RHSPP提供500 mm 500 mm X-Y平面，分辨率为1 nm，速度高达2 m/s。电机在传动系统中不使用机械部件，它们将驱动力无摩擦地传递到运动平台。这使得nm-RHSPP系统适用于高精度应用，如检测系统、激光打标、显微镜和扫描 ** 该工业设备将成为加拿大第一台为纽芬兰纪念大学以及纽芬兰和拉布拉多省的用户提供纳米级精度的平面高精度运动的工业设备。nm-RHSPP对支持两个研究项目至关重要：（i）为下一代光刻机设计新的精密运动系统，以及（ii）为低功率电子应用设计和优化压电微机电系统能量采集器和微系统。每年有20多名学生在申请人的监督下，首先接受设备培训，然后使用设备进行各种研究和学术活动。学生将获得半导体制造行业最新的高精度高速运动系统的独特和专业知识和实践技能。预计还将吸引来自纽芬兰和拉布拉多省工业界的研究人员。针对“下一代光刻机新型精密运动系统设计”的研究，主要目标是通过集成多轴压电纳米定位致动器，设计一种基于智能材料的自调节掩模版工作台，以最大限度地减少未来半导体制造设备中主运动系统（掩模版工作台和晶圆工作台）之间的定位误差。 这将导致极紫外光刻工艺的亚纳米精度，以制造更快、更智能、更轻的集成电路，用于新的应用和未来的挑战，包括用于联网自动驾驶汽车的微处理器和增强多智能体纳米机器人系统的集成电路。nm-RHSPP将有助于通过实验室测量所提出的MEMS器件来证实理论研究和数值模拟，并提高MEMS能量采集器的能量转换效率。