Nanometer-Resolution High-Speed Planar Positioning System

所要求的纳米分辨率高速平面定位（nm-RHSPP）系统是采用空气轴承技术设计的多轴运动平台，可在X-Y平面上提供纳米精度的无摩擦高精度定位。nm-RHSPP包括直线电机（三个磁性电机），测量系统（绝对编码器），空气轴承组件，先进的运动控制系统和花岗岩底座。nm- rhspp提供500mm - 500mm X-Y平面，分辨率为1nm，速度可达2m /s。电动机不使用传动系统中的机械部件，它们将驱动力传递给运动平台而没有摩擦。这使得nm-RHSPP系统适用于高精度应用，如检测系统，激光打标，显微镜和扫描******这种工业设备将是加拿大第一个为纽芬兰纪念大学以及纽芬兰和拉布拉多省的用户提供纳米精度的平面高精度运动的设备。nm-RHSPP对于支持两个研究项目至关重要：(i)为下一代光刻机设计新的精密运动系统，以及（ii）为低功耗电子应用设计和优化压电微机电系统能量收集器和微系统。在申请者的指导下，每年有超过20名学生将首先使用该设备进行培训，并使用该设备进行各种研究和学术活动。学生将获得半导体制造行业最新高精度高速运动系统的独特专业知识和实践技能。预计它还将吸引纽芬兰和拉布拉多省工业界的研究人员。******在“下一代光刻机新型精密运动系统设计”的研究中，主要目标是通过集成多轴压电-纳米定位执行器，设计一种基于智能材料的自调节光刻工作台，以最大限度地减少未来半导体制造机器中主要运动系统（光刻工作台和晶圆工作台）之间的定位误差。这将导致极紫外光刻工艺的亚纳米精度，以制造更快、更智能、更轻的集成电路，以应对新的应用和未来的挑战，包括用于连接自动驾驶汽车的微处理器和用于增强多智能体纳米机器人系统的集成电路。对于“压电微机电系统能量收集器和低功耗电子应用微系统的设计和优化”，nm-RHSPP将有助于通过对所提出的MEMS器件的实验室测量来确认理论研究和数值模拟，并提高MEMS能量收集器的能量转换效率。********

The requested nanometer-Resolution High Speed Planar Positioning (nm-RHSPP) system is a multi-axis motion stage designed with air bearing technology to provide frictionless high-precision positioning in X-Y plane with nanometers accuracy. The nm-RHSPP includes linear motors (three magnetic motors), measuring systems (absolute encoders), air bearing assemblies, an advanced motion control system, and a Granite base. The nm-RHSPP provides 500 mm 500 mm X-Y plane with 1 nm resolution and velocity up to 2 m/s. The motors do not use mechanical components in the drivetrain, and they transmit the drive force to the motion platform without friction. This makes the nm-RHSPP system is suited for high-precision applications, such as inspection systems, laser marking, microscopy, and scanning ******This industrial equipment will be the first of its kind in Canada to provide planar high-precision motion with nanomter accuracy to the users at Memorial University of Newfoundland as well as in the province of Newfoundland and Labrador. The nm-RHSPP is crucial to support two research programs: (i) design of new precision motion systems for the next-generation lithography machines, and (ii) design and optimization of piezoelectric Micro-Electro-Mechanical Systems energy harvesters and microsystems for low-power electronic applications. Each year over 20 students under the applicants' supervision, who will be first trained on the equipment, will use it to conduct various research and academic activities. The students will acquire unique and specialized knowledge and hands-on skills on most recent high-precision high-speed motion systems in the industry of the semi-conductor manufacturing. It is also anticipated to attract researchers from industry in the province of Newfoundland and Labrador.******For the “design of new precision motion systems for the next-generation lithography machines” research, the main objective is to design a self-regulating smart-material-based reticle stage by integrating mutli-axial piezo-nano-positioning actuators to minimize the positioning errors between the main motion systems (reticle stage and wafer stage) in the future semiconductor manufacturing machines. This will lead to sub-nanometer accuracy of the extreme ultraviolet lithography process to manufacture faster, smarter, and lighter integrated circuits for new applications and future challenges, including microprocessors for the connected autonomous car and integrated circuits to enhance the multi-agent nanorobotic systems.For “design and optimization of piezoelectric Micro-Electro-Mechanical Systems energy harvesters and microsystems for low-power electronic applications”, the nm-RHSPP will help to confirm the theoretical studies and numerical simulations by enabling laboratory measurements of the proposed MEMS devices and enhance energy conversion efficiency of the MEMS energy harvesters.********