Nanometer-Resolution High-Speed Planar Positioning System

所要求的纳米分辨率高速平面定位(nm-RHSPP)系统是采用空气轴承技术设计的多轴运动平台，可在X-Y平面上提供纳米级精度的无摩擦高精度定位。纳米RHSPP包括直线电机(三个磁电机)、测量系统(绝对式编码器)、空气轴承组件、先进的运动控制系统和花岗岩底座。纳米RHSPP提供了500 mm、500 mm的X-Y平面，分辨率为1 nm，速度高达2 m/S。电机不使用传动系统中的机械部件，它们将驱动力无摩擦地传递到运动平台。这使得nm-RHSPP系统适用于高精度应用，如检查系统、激光打标、显微镜和扫描*该工业设备将是加拿大第一个为纽芬兰纪念大学以及纽芬兰和拉布拉多省的用户提供纳米级精度的平面高精度运动的工业设备。纳米RHSPP对支持两个研究项目至关重要：(I)为下一代光刻机设计新的精密运动系统；(Ii)为低功耗电子应用设计和优化压电微机电系统能量采集器和微系统。每年在申请者指导下的20多名学生将首先接受有关设备的培训，他们将使用该设备进行各种研究和学术活动。学生将获得半导体制造行业中最新的高精度高速运动系统的独特和专业知识和动手技能。预计还将吸引来自纽芬兰和拉布拉多省工业界的研究人员。*在“为下一代光刻机设计新的精密运动系统”研究中，主要目标是通过集成多轴压电纳米定位驱动器来设计一种基于智能材料的自调节掩模台，以最大限度地减少未来半导体制造机主运动系统(掩模台和晶片台)之间的定位误差。这将导致极紫外光刻工艺的亚纳米精度，以制造更快、更智能、更轻的集成电路，以满足新的应用和未来的挑战，包括用于连接的自动驾驶汽车的微处理器和用于增强多代理纳米机器人系统的集成电路。对于“用于低功率电子应用的压电式微电子机械系统能量收集器和微系统的设计和优化”，nm-RHSPP将通过实现对所提出的MEMS器件的实验室测量来帮助确认理论研究和数值模拟，并提高MEMS能量收集器的能量转换效率。

The requested nanometer-Resolution High Speed Planar Positioning (nm-RHSPP) system is a multi-axis motion stage designed with air bearing technology to provide frictionless high-precision positioning in X-Y plane with nanometers accuracy. The nm-RHSPP includes linear motors (three magnetic motors), measuring systems (absolute encoders), air bearing assemblies, an advanced motion control system, and a Granite base. The nm-RHSPP provides 500 mm 500 mm X-Y plane with 1 nm resolution and velocity up to 2 m/s. The motors do not use mechanical components in the drivetrain, and they transmit the drive force to the motion platform without friction. This makes the nm-RHSPP system is suited for high-precision applications, such as inspection systems, laser marking, microscopy, and scanning ******This industrial equipment will be the first of its kind in Canada to provide planar high-precision motion with nanomter accuracy to the users at Memorial University of Newfoundland as well as in the province of Newfoundland and Labrador. The nm-RHSPP is crucial to support two research programs: (i) design of new precision motion systems for the next-generation lithography machines, and (ii) design and optimization of piezoelectric Micro-Electro-Mechanical Systems energy harvesters and microsystems for low-power electronic applications. Each year over 20 students under the applicants' supervision, who will be first trained on the equipment, will use it to conduct various research and academic activities. The students will acquire unique and specialized knowledge and hands-on skills on most recent high-precision high-speed motion systems in the industry of the semi-conductor manufacturing. It is also anticipated to attract researchers from industry in the province of Newfoundland and Labrador.******For the “design of new precision motion systems for the next-generation lithography machines” research, the main objective is to design a self-regulating smart-material-based reticle stage by integrating mutli-axial piezo-nano-positioning actuators to minimize the positioning errors between the main motion systems (reticle stage and wafer stage) in the future semiconductor manufacturing machines. This will lead to sub-nanometer accuracy of the extreme ultraviolet lithography process to manufacture faster, smarter, and lighter integrated circuits for new applications and future challenges, including microprocessors for the connected autonomous car and integrated circuits to enhance the multi-agent nanorobotic systems.For “design and optimization of piezoelectric Micro-Electro-Mechanical Systems energy harvesters and microsystems for low-power electronic applications”, the nm-RHSPP will help to confirm the theoretical studies and numerical simulations by enabling laboratory measurements of the proposed MEMS devices and enhance energy conversion efficiency of the MEMS energy harvesters.********