Development of Electromagnetic Reluctance Motion Actuator for Scanning and Advanced Manufacturing Applications for Industry 4.0

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Intelligent manufacturing advancements are critical for Industry 4.0, which necessitates the development of new high-performance electronic devices and high-acceleration motion systems. The market issue is that higher acceleration, accuracy, and productivity are required to progress toward Industry 4.0. High acceleration motion control is required for a variety of applications, including robotics, CNC fabrication, biomedical, microscopy, chemistry, spectrometry imaging, nanostructure scanning, micro and nanomanufacturing, spectroscopy, and non-linear and ultrafast optics. The amount of acceleration that industries' motion systems can provide is limited. The semiconductor manufacturing industry is an excellent example; increasing the throughput and performance of integrated circuits (IC) is critical to meeting the growing demands of future micro and nanotechnologies for various innovative industrial applications in Industry 4.0.The product is a low-cost, compact, integrated, and controllable precision motion system powered by a Reluctance Actuator (RA). When compared to other electromagnetic actuators, the electromagnetic properties of RA enable higher forces to be generated with a small actuator size, resulting in a more energy-efficient actuation system with low cooling requirements. The increased force generated enables higher acceleration demands, resulting in faster and more efficient control for high-precision motion control systems. Furthermore, the RA can be made from ferromagnetic materials, which are widely used in the production of transformers, circuit breakers, and electrical motors, and are readily available commercially at low prices. RA is currently only used in a few applications involving magnetic bearings and magnetic switches.