Next Generation Electromechanical Sensors

下一代机电传感器

• 批准号: RGPIN-2022-03343
• 负责人: AbdelRahman, Eihab
• 金额: $ 2.33万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2022
• 资助国家: 加拿大
• 起止时间: 2022-01-01 至 2023-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=765905
• 关键词: Next; Generation; Electromechanical; Sensors

The proposed research program will advance the state-of-the-art on micro and nano electromechanical systems (MEMS) and (NEMS) along two main thrusts. The first will lay a technical framework for the development of large signal and high-frequency MEMS sensors and room temperature NEMS sensors. It will build on this framework to realize high sensitivity MEMS and NEMS gas, chemical, and biological sensors. The second thrust will develop systematic methods to design and realize robust MEMS actuators that can perform complex functions under challenging conditions. It will implement those methods to deliver robust deformable micro mirrors and micro tweezers. MEMS and NEMS are active research and innovation areas just coming to their own. They have capitalized on a relatively mature and cost-effective fabrication technology to introduce novel micro-machines (sensors and actuators) that do not only outperform their macro counterparts, but also introduce new functionalities. They have completely transformed the sensor market over the last decade and made significant, but limited, inroads in the actuator markets. The proposed research program aims to unleash the full potential of MEMS / NEMS sensors and actuators by marshalling analytical tools of nonlinear dynamics and experimental tools of optical and electrical metrology to understand, control, and reduce to engineering practice the complex motions and responses of those systems. Over the next 5 years, it will undertake the fundamental investigations and device developments described below. 1) Currently, the sensor industry is hampered by obsolete notions on sensor design. Historically, it had to limit sensors to a small (linear) range where a single constant (sensitivity) relates the stimulus to the output signal (measurand). This is unnecessary now under the current standards of Digital Signal Processing that can handle arbitrary stimulus-measurand relationships. But the industry is still wedded to the concept of linearity to the point where it considers it a metric of performance. This constraint limits the sensor operating range to small signals (motions), thereby reducing the quality of their measurements: Signal-to-Noise Ratio (SNR). Moving to a new paradigm of Large Signal Sensors will increase the SNR, allowing the same sensor to produce larger signal (measurand) in response to the same stimulus. It will make sensors more robust, reduce the signal conditioning requirements, and make sensor systems simpler and cheaper. This program will lay the technical grounds and create a path for the next stage of the sensor industry growth. 2) We will develop MEMS actuators, micro tweezers and deformable micro mirrors, that combine complex functionality, low-voltage requirements, and all-electric detection and control techniques. Those actuators will enable novel test modalities of micro-objects (cells and DNA) and adaptive optics systems for a wide of applications from astronomy to ophthalmology.

拟议的研究计划将沿着两个主要方向推进微纳机电系统（MEMS）和（NEMS）的最先进技术。第一个将为大信号和高频MEMS传感器以及室温NEMS传感器的开发奠定技术框架。它将在此框架基础上实现高灵敏度 MEMS 和 NEMS 气体、化学和生物传感器。第二个重点是开发系统方法来设计和实现稳健的 MEMS 执行器，这些执行器可以在具有挑战性的条件下执行复杂的功能。它将实施这些方法来提供坚固的可变形微镜和微镊子。 MEMS 和 NEMS 是活跃的研究和创新领域，刚刚崭露头角。他们利用相对成熟且具有成本效益的制造技术来引入新颖的微型机械（传感器和执行器），这些机械不仅优于宏观机械，而且还引入了新的功能。他们在过去十年中彻底改变了传感器市场，并在执行器市场取得了重大但有限的进展。拟议的研究计划旨在通过整合非线性动力学分析工具和光学和电气计量实验工具来释放 MEMS / NEMS 传感器和执行器的全部潜力，以理解、控制这些系统的复杂运动和响应，并将其减少到工程实践中。未来5年，它将进行下述基础研究和设备开发。 1) 目前，传感器行业因传感器设计观念过时而受到阻碍。从历史上看，它必须将传感器限制在一个小的（线性）范围内，其中单个常数（灵敏度）将刺激与输出信号（被测量）联系起来。在可以处理任意激励-被测量关系的当前数字信号处理标准下，现在这是不必要的。但业界仍然坚持线性概念，甚至将其视为性能指标。这种限制将传感器的工作范围限制为小信号（运动），从而降低了测量的质量：信噪比（SNR）。转向大信号传感器的新范例将提高信噪比，允许相同的传感器响应相同的刺激而产生更大的信号（被测量）。它将使传感器更加稳健，降低信号调节要求，并使传感器系统更简单、更便宜。该计划将为传感器行业下一阶段的发展奠定技术基础并开辟道路。 2）我们将开发MEMS执行器、微镊子和可变形微镜，它们结合了复杂的功能、低电压要求和全电检测和控制技术。这些执行器将为微观物体（细胞和 DNA）和自适应光学系统提供新颖的测试模式，适用于从天文学到眼科的广泛应用。