Micro-Electro-Mechanical Sensors and Actuators

微机电传感器和执行器

• 批准号: RGPIN-2016-04345
• 负责人: AbdelRahman, Eihab
• 金额: $ 2.77万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=638661
• 关键词: Micro; Electro; Mechanical; Sensors; Actuators

My research area is the dynamics of electromechanical systems. The recent availability of Micro-Electro-Mechanical Systems (MEMS) fabrication technology has allowed this field to combine an active research and innovation area to low-cost fabrication. I will exploit this opportunity to introduce novel sensors, actuators, and micro-power generators (MPGs) that outperform their macro counterparts and add new functionality. Towards that end, I propose a research program to advance fundamental knowledge and device development as follows:

我的研究区域是机电系统的动力学。微型机电系统（MEMS）制造技术的最新可用性使该领域可以将积极的研究和创新区域结合到低成本制造。我将利用这个机会来引入新颖的传感器，执行器和微功率发电机（MPG），以优于其宏对应物并添加新功能。为此，我提出了一项研究计划，以提高基本知识和设备的开发，如下所示：