Micro-Electro-Mechanical Sensors and Actuators

微机电传感器和执行器

• 批准号: RGPIN-2016-04345
• 负责人: AbdelRahman, Eihab
• 金额: $ 2.77万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=638661
• 关键词: Micro; Electro; Mechanical; Sensors; Actuators

My research area is the dynamics of electromechanical systems. The recent availability of Micro-Electro-Mechanical Systems (MEMS) fabrication technology has allowed this field to combine an active research and innovation area to low-cost fabrication. I will exploit this opportunity to introduce novel sensors, actuators, and micro-power generators (MPGs) that outperform their macro counterparts and add new functionality. Towards that end, I propose a research program to advance fundamental knowledge and device development as follows:

我的研究领域是机电系统的动力学。最近，微电子机械系统(MEMS)制造技术的出现使该领域能够将一个活跃的研究和创新领域与低成本制造结合起来。我将利用这个机会介绍新的传感器、执行器和微型发电机(MPG)，它们的性能优于它们的宏观对应产品，并增加了新的功能。为此，我提出了一项研究计划，以促进基础知识和设备开发，如下所示：