Micro-Electro-Mechanical Sensors and Actuators

我的研究领域是机电系统动力学。最近微机电系统（MEMS）制造技术的可用性使得该领域结合了一个活跃的研究和创新领域，以低成本制造。我将利用这个机会介绍新的传感器、执行器和微型发电机（mpg），它们的性能优于它们的宏观同类产品，并增加了新的功能。为此，我提出了一个研究计划，以推进基础知识和设备开发如下：

My research area is the dynamics of electromechanical systems. The recent availability of Micro-Electro-Mechanical Systems (MEMS) fabrication technology has allowed this field to combine an active research and innovation area to low-cost fabrication. I will exploit this opportunity to introduce novel sensors, actuators, and micro-power generators (MPGs) that outperform their macro counterparts and add new functionality. Towards that end, I propose a research program to advance fundamental knowledge and device development as follows: 1) Micro Actuators: We will investigate analytically (using nonlinear dynamics tools) and experimentally (using, interferometric measurements and analog control) the dynamics of electrostatic, electromagnetic, and hybrid MEMS actuators to understand and stabilize large orbit motions and locate bifurcations in their response. This fundamental research will be deployed to develop hand-held electrostatic MEMS Atomic Force Microscopes (AFM). The AFM will combine technology we have developed and proven for low-voltage actuation, all-electric sub-nano-meter position detection, and feedback control to stabilize long-stroke electrostatic actuators. 2) Micro Sensors: We will use our findings on locations and behavior of electrostatic MEMS in the vicinity of instabilities (bifurcations) to develop bifurcation-based sensors. These sensors exploit an bifurcations to amplify a small stimulus into a large detection signal, thereby improving sensitivity but not cost. We developed a new class of bifurcation sensors: binary sensors that detects whether the concentration of as analyte is above or below a safety threshold. Our static binary sensors demonstrated ability to detect 5ppm of ethanol vapor, one order-of-magnitude better than the commercial equivalent. Binary sensors are also more robust (simpler) than the commercial equivalents. We will develop the fundamental knowledge necessary to design and we will demonstrate dynamic binary gas and chemical (under water) sensors. Exploiting dynamic amplification will improve the sensitivity of dynamic binary sensors by 1-2 orders-of-magnitude over static binary senors. 3) MPGs: We will extend the use of impact oscillators and springless harvester architecture from electromagnetic to electrostatic MPGs and develop wideband and low-frequency electrostatic MPGs. Towards that goal, we will extend our fundamental analysis of MPGs dynamics from electromagnetic to electrostatic transduction. Because electrostatic MPGs become more efficient as their size scales down, we will use them to design electrostatic MEMS MPGs, thereby harvesting low-amplitude motions. Finally, we will combine our expertise in sensors and MPGs to develop passive fatigue sensors that use low-amplitude MPGs as an integrating sensor to measure the total strain energy applied to a structure or kinetic energy spent by a human.