Micro-Electro-Mechanical Sensors and Actuators

我的研究领域是机电系统动力学。最近微机电系统（MEMS）制造技术的可用性使得该领域结合了一个活跃的研究和创新领域，以低成本制造。我将利用这个机会介绍新的传感器、执行器和微型发电机（mpg），它们的性能优于它们的宏观同类产品，并增加了新的功能。为此，我提出了一项研究计划，以推进基础知识和器件开发如下：***1)微致动器：***我们将分析（使用非线性动力学工具）和实验（使用干涉测量和模拟控制）静电，电磁和混合MEMS致动器的动力学，以了解和稳定大轨道运动并定位其响应中的分叉。这项基础研究将用于开发手持式静电MEMS原子力显微镜（AFM）。AFM将结合我们已经开发和验证的低压驱动技术，全电动亚纳米位置检测技术，以及稳定长行程静电执行器的反馈控制技术。***2)微传感器：***我们将利用我们对静电MEMS在不稳定性（分岔）附近的位置和行为的发现来开发基于分岔的传感器。这些传感器利用分岔将一个小的刺激放大成一个大的检测信号，从而提高灵敏度而不是成本。我们开发了一类新的分岔传感器：检测分析物浓度是否高于或低于安全阈值的二元传感器。我们的静态二元传感器能够检测到5ppm的乙醇蒸气，比商业等价物好一个数量级。二进制传感器也比商业上的同类产品更健壮（更简单）。我们将开发设计所需的基础知识，并演示动态二元气体和化学（水下）传感器。利用动态放大可以使动态二进制传感器的灵敏度比静态二进制传感器提高1-2个数量级。***3) MPGs:***将冲击振荡器和无弹簧采集器架构的使用从电磁MPGs扩展到静电MPGs，并开发宽带和低频静电MPGs。为了实现这一目标，我们将把我们对MPGs动力学的基本分析从电磁扩展到静电转导。由于静电mpg随着尺寸的缩小而变得更高效，我们将使用它们来设计静电MEMS mpg，从而收集低振幅运动。最后，我们将结合我们在传感器和mpg方面的专业知识开发被动疲劳传感器，该传感器使用低振幅mpg作为集成传感器来测量施加于结构的总应变能或人体消耗的动能

My research area is the dynamics of electromechanical systems. The recent availability of Micro-Electro-Mechanical Systems (MEMS) fabrication technology has allowed this field to combine an active research and innovation area to low-cost fabrication. I will exploit this opportunity to introduce novel sensors, actuators, and micro-power generators (MPGs) that outperform their macro counterparts and add new functionality. Towards that end, I propose a research program to advance fundamental knowledge and device development as follows:***1) Micro Actuators:***We will investigate analytically (using nonlinear dynamics tools) and experimentally (using, interferometric measurements and analog control) the dynamics of electrostatic, electromagnetic, and hybrid MEMS actuators to understand and stabilize large orbit motions and locate bifurcations in their response. This fundamental research will be deployed to develop hand-held electrostatic MEMS Atomic Force Microscopes (AFM). The AFM will combine technology we have developed and proven for low-voltage actuation, all-electric sub-nano-meter position detection, and feedback control to stabilize long-stroke electrostatic actuators.***2) Micro Sensors:***We will use our findings on locations and behavior of electrostatic MEMS in the vicinity of instabilities (bifurcations) to develop bifurcation-based sensors. These sensors exploit an bifurcations to amplify a small stimulus into a large detection signal, thereby improving sensitivity but not cost. We developed a new class of bifurcation sensors: binary sensors that detects whether the concentration of as analyte is above or below a safety threshold. Our static binary sensors demonstrated ability to detect 5ppm of ethanol vapor, one order-of-magnitude better than the commercial equivalent. Binary sensors are also more robust (simpler) than the commercial equivalents. We will develop the fundamental knowledge necessary to design and we will demonstrate dynamic binary gas and chemical (under water) sensors. Exploiting dynamic amplification will improve the sensitivity of dynamic binary sensors by 1-2 orders-of-magnitude over static binary senors.***3) MPGs:***We will extend the use of impact oscillators and springless harvester architecture from electromagnetic to electrostatic MPGs and develop wideband and low-frequency electrostatic MPGs. Towards that goal, we will extend our fundamental analysis of MPGs dynamics from electromagnetic to electrostatic transduction. Because electrostatic MPGs become more efficient as their size scales down, we will use them to design electrostatic MEMS MPGs, thereby harvesting low-amplitude motions. Finally, we will combine our expertise in sensors and MPGs to develop passive fatigue sensors that use low-amplitude MPGs as an integrating sensor to measure the total strain energy applied to a structure or kinetic energy spent by a human.**