近红外光谱分析技术以其无损、快速、高通量定性定量检测固态、液态和气态物质组分与含量的独特优势，已成为现场快速检测、流程工业在线过程分析与质量控制的重要手段。而低成本、高性能微型近红外光谱仪是制约近红外光谱分析技术发展与拓展应用的主要瓶颈之一。.在申请者长期研究微型光谱仪技术基础上，提出了一种将光栅、微镜和角传感器一体化单片集成的MOEMS 扫描光栅微镜新结构和基于扫描光栅微镜的微型近红外光谱仪，提出了基于扫描光栅微镜角传感器信号实现扫描光栅微镜高精度闭环控制和光谱信息准确探测的新思想与新方法。重点突破基于MOEMS 技术的扫描光栅微镜设计与制造关键技术，突破微型近红外光谱仪的集成设计、扫描光栅微镜精确控制与光谱准确采集策略、系统标定与误差补偿等关键技术。研制出达到国际先进水平的微型近红外光谱仪，实现在食品安全领域的应用验证，推动微型光谱仪整体技术发展，解决新一代微小型检测装备的共性瓶颈。

Near Infrared Spectroscopy has several distinct advantages, such as non-destructive, rapid, high-throughput, qualitative and quantitative measurement when detecting the solid, liquid and gaseous objects, and has become an important approach for the on-line detection, industry process analysis and quality control. However, designing and manufacturing low-cost, high-performance miniaturized NIR spectrometer is one of the main bottlenecks constraining the development and application of NIR spectroscopy technology..As a senior researcher in the field of design and manufacture of the micro-spectrometer, a group led by the applicant propose a new structure for miniaturized NIR spectrometer which integrates grating, scanning micro-mirror and angle sensor on one single chip. A novel miniaturized NIR spectrometer will be implemented based on scanning grating micro-mirror consequently. It is a novel idea in this optical system to implement the closed-loop control to the scanning grating micro-mirror and acquire the high-precision spectrum based on the output of angle sensor. In this proposal, there are several breakthroughs including the design and manufacture technology of scanning grating micro-mirror, implementation of the hybrid-integrated miniaturized NIR spectrometer, precise control of scanning grating micro-mirror, accurate acquisition strategy of the spectrum, system calibration and error compensation. We attempt to develop a miniaturized NIR spectrometer reaching the international advanced level to promote the development of the miniaturized NIR spectrometer and pave the road for its application in the field of food security, and finally to solve common bottleneck of a new generation of miniaturized detection equipment.