Engineering Research Equipment Grant: Diffusion Furnace System

建议开发1）适合于以下的微探针： 测定固定化细胞中的局部浓度分布 层，2）稳定的、流动不敏感的、可蒸汽灭菌的 溶解氧传感器，和3）微型 机电阀门和泵， 微电路制造技术 所提出的微探针 用于测量微环境条件， 预期固定化细胞的附近 大大扩大了研究范围与固定 细胞突起 所提出的DO传感器将特别地 用于监测哺乳动物细胞中的溶解氧 培养物和固定化细胞反应器中， 不能提供介质流。 拟议 微机电阀门和泵将是必不可少的， 在硅片上开发精密仪器， 可以大量生产用于各种应用。 携带 提出的研究成功，扩散炉 能够氧化硅晶片和化学品的系统 需要气相沉积。

It is proposed to develop 1) microprobes suitable for measuring local concentration profiles in immobilized cell layers, 2) a stable, flow-insensitive, steam-sterilizable dissolved oxygen sensor, and 3) microminiature electromechanical valves and pumps by making use of microcircuit fabrication technology. The proposed microprobes for measuring microenvironmental conditions in the immediate vicinity of the immobilized cells are expected to significantly expand the scope of research with immobilized cell processes. The proposed DO sensor will be particularly useful for monitoring dissolved oxygen in mammalian cell cultures and in immobilized cell reactors where sufficient medium flow cannot be provided. The proposed microelectromechanical valves and pumps will be essential for developing sophisticated instruments on a silicon wafer, which can be mass produced for a variety of applications. To carry out the proposed research successfully, a diffusion furnace system capable of oxidation of silicon wafers and chemical vapor deposition is requested.