Renovation of Advanced Thin Film Smart Materials Processing Research Laboratory

NSF资金将支持开发一个无尘室，作为马里兰大学学院园区材料和核工程项目先进薄膜材料实验室的一部分。翻新后的设施将位于已有30年历史的J.M.Patterson大楼内，将成为薄膜沉积和SMART+材料样品制备的关键资源。该设施将使下一代铁电设备和微电子机械(MEMS)结构的先进互连取得突破。材料加工需要无尘环境，具有经过过滤的循环去离子水和无振动地板。现有空间缺乏这些必需品，与该部为这项工作已经拥有和使用的基本建设设备不相容。翻新空间以容纳设备和研究活动有望消除科学突破的一个主要障碍。目前的空间有露出的天花板水管，不包括获得去离子水。设备的电力是通过危险的悬挂线提供的，房间里没有空气再循环过滤系统。窗户、墙壁和门没有充分密封，以防止颗粒物。现有的引擎盖数量不足，功能不在可接受的安全标准之内。翻修工作将提供一个1000级的洁净室环境，采用层压板装饰、硬纸板墙板和门、悬挂天花板和新的乙烯基地板饰面。设施旁边将放置立式衣柜式空调机组，以确保室内温度和湿度的稳定，并在天花板上安装绝对的HEPA过滤器，以确保空气再循环中几乎100%的颗粒物去除效率。新设施将为研究生培训提供新的材料加工机会。研究活动将包括薄膜马氏体、铁电氧化物和薄膜的快速热处理。薄膜马氏体研究强调薄膜复合材料的弹性和滞弹性性能，并将导致独特的微机械器件的发展。铁电氧化物中的活性将直接来自铁电薄膜、光存储器和光信号处理器。快速热处理将使研究人员能够定制表面和界面材料的属性。7名教师和他们的研究生研究人员将成为新实验室设施的直接受益者。

NSF funds will support the development of a clean room as part of the Advanced Thin Film Materials Laboratory for the Materials and Nuclear Engineering program at the University of Maryland, College Park. The renovated facility will be located in the 30-year old J.M. Patterson building and will be a critical resource for film deposition and sample preparation of -smart+ materials. The facility will enable breakthroughs for advanced interconnects for the next generation of ferroelectric devices and micro-electromechanical (MEMS) structures. Materials processing requires a dust-free environment with filtered recirculated de-ionized water and vibration-free flooring. The existing space lacks these necessities and is incompatible with the capital equipment already owned and utilized by the department for this work. The renovation of space to house the equipment and the research activity promises to remove a major impediment to scientific breakthroughs. The current space has exposed ceiling pipes for water and does not include access to de-ionized water. Power to the equipment is provided through dangerous hanging cords, and the rooms are without an air recirculation filtration system. The windows, walls and doors are not adequately sealed against particulate matter. The existing hoods are insufficient in number and do not function within acceptable standards of safety. The renovation effort will provide a class 1,000 clean room environment with laminate finish chipboard wall panels and doors, suspended ceilings and a new vinyl floor finish. Vertical wardrobe-type air conditioning units will be placed adjacent to the facility to assure internal temperature and humidity stability, and absolute H.E.P.A. filters will be mounted in the ceiling to assure almost 100% efficiency in particulate removal in air recirculation. The new facility will provide new opportunities in materials processing for graduate student training. Research activities will include thin film martensite, ferroelectric oxides, and rapid thermal processing of thin films. Thin film martensite investigations emphasize elastic and anelastic properties of thin film composites and will lead to the development of unique micro-mechanical devices. The activities in ferroelectric oxides will feed directly from ferroelectric films optical memories and optical signal processors. Rapid thermal processing will allow the researcher to tailor surface and interface material properties. Seven faculty and their graduate researchers will be the direct beneficiaries of the new laboratory facility.