Point of Use Generation of Silane Gas

硅烷是一种有毒的自燃气体，半导体制造业大量使用(15万磅/年)。先进技术材料公司(ATMI)在开发洗涤器、净化器和有害气体输送系统方面处于世界领先地位。在拟议的第一阶段计划中，ATMI将与威斯康星大学合作，确定以使用点方式从无害前体中生产硅烷的可行性。前体是专门设计的，既可以产生高纯度的硅烷，也可以回收化学副产品。硅烷产生系统的可用将是对半导体制造设施及其所在社区环境安全和健康的重大改进。在第二阶段计划中，ATMI将为前体开发大规模合成程序，并将建造一个原型发电机，用于生长高纯度硅。这将导致该系统在第三阶段进行商业引进。

Silane is a toxic, pyrophoric gas which is used in large quantities (150,000 lbs/yr) by the semiconductor manufacturing industry. Advanced Technology Materials (ATMI) is a world leader in the development of scrubbers, purifiers, and delivery systems for hazardous gases. In the proposed Phase I program ATMI will work with the University of Wisconsin to determine the feasibility of generating silane in a point-of-use fashion from nonhazardous precursors. The precursors are specifically designed to allow both generation of high purity silane and recycling of the chemical byproducts. The availability of a silane generation system would represent a major enhancement to the environmental safety and health of semiconductor fabrication facilities and the communities in which they are located. In the Phase II program ATMI will develop large scale synthetic procedures for the precursors and will build a prototype generator which will be used to grow high purity silicon. This will lead to commercial introduction of the system in Phase III.