SGER: High Precision Pulsed Laser Curvature Modification

徐德美-9813758这个探索性研究小额资助项目的目标是开发和评估一种亚微弧度量级的曲率修正技术。高精度的曲率修正在许多制造工艺中都是有用的，特别是在微电子工业中。例如，高容量计算机硬盘中的一些部件所需的平面度在十纳米量级；其曲率小于一微弧度。目前，还没有能够以如此高的精度修改曲率的技术。提出了一种基于激光的高精度曲率修正技术。利用受控脉冲激光来提高靶材的温度，诱导塑性变形，从而改变靶材的曲率。项目工作将对脉冲激光用于曲率修正的可行性进行探索性研究。将研究高精度曲率修正的重复性，以及激光照射引起的材料结构和性能的变化。还将进行实验研究，以将激光加工参数与激光诱导的曲率变化相关联。该项目的成果将对精密激光弯曲技术的评价和发展具有重要意义。该项目将为研究生和本科生提供研究机会。这项研究项目也可能成为P.I.课程《激光加工》的一个主题，以便向大量学生介绍新的激光加工技术。因此，该项目将为激光技术领域的人力资源开发做出贡献。1

Xu DMI-9813758 The objective of this Small Grant for Exploratory Research (SGER) project is to develop and evaluate a curvature modification technique with precision on the order of sub-micro-radians. High precision curvature modification is useful in many manufacturing processes, particularly in microelectronics industry. For example, the required flatness of some components in a high capacity computer hard disk is on the order of ten nanometers; its curvature is less than one micro radian. Currently, no technique is available for modifying curvature with such high precision. A laser-based high-precision curvature modification technique is proposed. A controlled pulsed laser beam will be used to raise the temperature of the target material and induce plastic deformation, therefore, to change the curvature of target material. The project work will carry out exploratory research on the feasibility of using pulsed lasers for curvature modification. The repeatability of high precision curvature modification, and materials' structural and property changes due to laser irradiation will be investigated. Experimental studies will also be conducted to correlate laser processing parameters with the laser-induced curvature change. The outcome of the project will be instrumental to the evaluation and development of the precision laser bending technology. This project will provide research opportunities to graduate and undergraduate students. This research project could also become a topic in the course taught by the P.I, "Laser Processing", so that a large number of students will be introduced to novel laser processing techniques. Therefore, this project will contribute to the human resource development in the area of laser technology. 1