TIE PROJECT: Industry/University Cooperative Research Center for Microcontamination Control: Detection and Control of Micro-Biocontamination in Ultra Pure Water Proces

这个为期三年的项目联合了4个产学研合作中心（I/UCRC）和工程研究中心（ERC），研究半导体芯片生产中超纯水中微生物污染的检测和控制。该研究将侧重于芯片晶圆的化学/机械（CMP）工艺，因为这是一个高能耗的水，并与废水的产生有关。该项目旨在发展微生物污染的控制，以回收这些昂贵的水。亚利桑那大学I/UCRC微污染控制将建立和维护一个铜CMP试点系统，以研究监测系统中生物膜生长和污染的离线计量。该系统还将为其他中心的研究成果提供测试基地。亚利桑那大学环境友好型半导体工程研究中心将研究使用高级氧化工艺去除任何生物污染物并减少总有机碳。位于布法罗的纽约州立大学工业/大学生物表面合作研究中心将研究测量和监测生物污染的机制。新泽西理工学院/UCRC危险废物管理将研究如何防止用于超纯水脱气的膜的生物燃料。贝尔法斯特女王大学（I/UCRC）的QUESTOR将研究系统中生物的微生物学以及它们如何相互作用并获得食物。（这项活动将由北爱尔兰研究和技术股提供资金。）I/UCRC微污染研究中心将在其洁净室的超纯水系统中测试如何将研究结果用于可能的回收系统。

ABSTRACT EEC-9815211 BAIER This three-year project unites 4 Industry/University Cooperative Research Centers (I/UCRC) and Engineering Research Center (ERC) to study the detection and control of microbiological contamination in ultra-pure water used in the production of semi-conductor chips. The study will focus on the chemical/mechanical (CMP) processes of chip wafers since this is a high consumer of water and associated with the generation of waste water. The project aims at developing the control of micro-biocontamination in order to recycle this expensive water. The University of Arizona I/UCRC for Microcontamination Control will build and maintain a copper CMP pilot system to study off-line metrology for monitoring biofilm growth and contamination in the system. The system will also provide a test base to test the research results of the other centers. The University of Arizona Engineering Research Center for Environmentally Benign Semiconductors will study the use of advanced oxidation processes to remove any biological contaminants and reduce total organic carbons. The State University of New York at Buffalo Industry/University Cooperative Research Center for Biosurfaces will study mechanisms to measure and monitor the biocontamination. The New Jersey Institute of Technology I/UCRC for Hazardous Waste Management will study how to prevent biofueling of membranes used to degassify the ultra-pure water to be recycled. The Queen's University at Belfast (I/UCRC) QUESTOR will study the microbiology of organisms in the system and how they interact and obtain food. (This activity will be funded by the Northern Ireland Research and Technology Unit.) The I/UCRC for Microcontamination will test how the research results can be utilized for a possible recycling system in its ultra-pure water system in its clean room.