A Microelectronic Processing Lab Course Designed to Stimulate Interdisciplinary Team Learning

针对电子材料处理的教育活动是科罗拉多矿业学院本科课程中一个新的、不断增长的组成部分。这种扩展本质上是多学科的，校园内至少有四个部门深度参与了这种增长。它还得到了行政部门的大力支持，办法是招聘在这一领域具有专门知识的新教员、建造新设施和开发新课程。尽管如此，该项目迫切需要开设电子材料加工实验班，为学生提供有关器件制造步骤的实践经验。该提案的目标是获得开发本实验课程所需的关键加工设备。拟议课程的一个主要目标是让本科生对半导体器件的生产工艺有一个基本的了解。同样重要的是要注重在跨学科的环境中发展团队合作和沟通能力。实验活动将由来自四个不同系的高年级学生进行。实验项目将被设计为从不同团队成员的不同才能中汲取灵感。由于拟议的实验将相对简单，学生将被允许帮助设计他们自己的实验，而不仅仅是遵循加工食谱。通过口头和书面形式与同学们交流个人项目成果将是本课程的一个重要方面。由于设备处理将化学、物理、材料科学和工程的各个方面集中在一个非常明显的应用中，本课程将提供一个创新的媒介，以强调多学科教育的价值。该课程还将提供学生所接受的课堂教学与影响他们日常生活的技术之间的直接联系。我们认为，这种方法将成功地强化在其他课程中学到的概念，并将培养学生毕业后在职业生涯中必不可少的团队合作和沟通技能。

Educational activities directed at electronic materials processing are a new and growing component of the Colorado School of Mines undergraduate curriculum. This expansion is multidisciplinary in nature with at least four departments on campus heavily involved in the growth. It has also been strongly supported by the administration through the recruitment of new faculty with expertise in this area, the construction of new facilities, and the development of new curricula. Nevertheless, the program has a critical need for a laboratory class in electronic materials processing to provide students with hands-on experience with the steps involved in device fabrication. The goal of this proposal is to obtain key pieces of processing equipment needed to develop this lab course. A primary goal of the proposed course will be to give undergraduates a fundamental understanding of the processes leading to the production of semiconductor devices. Equally important will be the focus on developing teamwork and communication skills in an interdisciplinary environment. Lab activities will be performed by senior level students from four different departments. The lab projects will be designed to draw from the diverse talents of the various team members. Since the proposed experiments will be relatively simple, the students will be allowed to help design their own experiments and not just follow processing recipes. The communication of individual project results to their fellow classmates through both verbal and written mediums will be an important aspect of the course. Since device processing brings aspects of chemistry, physics, materials science, and engineering together in one very visible application, the course will provide an innovative medium for emphasizing the value of a multidisciplinary education. The class will also provide a direct connection between the classroom instruction students have received and the technology that impacts them daily. We feel that this approach will be successful in reinforci ng concepts learned in other classes, and that it will develop the teamwork and communication skills essential for the students' careers after graduation.