Cutting Behavior and Process Monitoring During Grinding of Ceramics Using CVD-Tools

微系统技术已经在日常生活中得到了广泛的应用，从医学到国防系统，从通信到体育，其重要性一直在不断增长。机械加工技术的优点是非常灵活，能够制造几乎所有材料的结构。这使得它们对于小批量或单个部件非常有用，因为UV掩模的精度和生产时间要求可以通过常规加工工艺获得。然而，目前还没有允许在该过程中检测微型工具破损的系统。由于尺寸很小，特别是工具的直径，并且与其固有的易碎性有关，甚至很难检测到工具的破损。因此，在用共焦显微镜检查所产生的结构之前，不能看到工具故障。该方案的目的是开发和集成刀具故障检测系统和光学检测，以便在微小零件的加工过程中提供在线监控系统。为此，将加速度传感器和力测量装置集成在一台微型机器中。将调查过程中测量系统和刀具失效之间的关系。因此，将设定保证充分的切割行为的限制。要做到这一点，将研究难切削压电复合材料，因为它可以用传统工具加工，并使用金刚石CVD铅笔和CVD砂轮。

Microsystems technology has found applications in a wide range of everyday live, from medicine to defence systems, from communication to sports and its importance has been continuously growing. The machining techniques have the advantage of being very flexible and able to produce structures in nearly all materials. This makes them very useful for small batches or single parts, as UV masks were the accuracy and production time requirements can be obtained with convention machining process. Nevertheless there are no systems allowing detecting the breaking of micro tools during the process. Due to the very small dimensions, specially the diameter of tools, and associated with its inherent fragility, it is even hard to detect a tool breakage. Thus a tool failure cannot be seen until the produced structure is checked with a confocal microscope. The aim of this proposal is to develop and integrate a tool failure detection system and an optical inspection in order to provide an in process monitoring system during the machining of micro parts. To do so acceleration sensors and a force measurement device are integrated in a micro machine. The relationship between the in process measurement system and tool failure will be investigated. Thus the limits guaranteeing a sufficient cutting behaviour will be set. To do so hard to cut piezo composite materials are going to be investigated due to its machinability by means of conventional tools and using diamond CVD-pencils and CVD-grinding wheels.