Investigation of Vapor Phase Organic Coatings for High Reliability Microelectromechanical Systems (MEMS)

本研究项目将探讨气相沉积的有机涂层的抗粘滞效果。气相法比标准液相法更环保，也更经济。此外，由于可能更容易控制和更好的均匀性，干燥工艺可能更容易从研究阶段扩大到生产阶段。由于硅具有优异的机械性能，人们对开发利用硅作为机械材料的技术越来越感兴趣。其中一种被称为表面微加工的技术，由多层结构和牺牲薄膜的沉积和选择性蚀刻组成，是微机电系统（MEMS）的核心技术过程。尽管表面微加工取得了重大进展，但粘滞仍然是一个关键问题，严重限制了许多MEMS器件的实现和可靠性。该项目将为研究生提供核心培训。该学生将受益于表面科学、机电工程和材料科学交叉学科的跨学科培训。一个额外的回报是实现更高可靠性的MEMS。PI将继续她对教育的持续承诺，包括向代表性不足的群体开展外展活动，本科生参与将要进行的研究工作，关于微系统技术和表面工程主题的公开演讲，以及积极参与这些主题的课程开发。

This research project will explore the anti-stiction effectiveness of a number of organic coatings deposited from vapor phase. Vapor-phase processes would be environmentally friendlier and more economical than standard liquid-phase processes. Furthermore, dry processes may well result easier to scale-up from research stage to production, due to the potential for easier control and better uniformity. Because silicon has excellent mechanical properties, there is a growing interest in developing technologies that use silicon as a mechanical material. One such technology, called surface micromachining, consists of deposition and selective etching of multiple layers of structural and sacrificial thin films, and is a core technological processes underlying microelectromechanical systems (MEMS). Despite significant advances in surface micromachining, stiction remains a key problem, severely limiting the realization and reliability of many MEMS devices. The project will provide core training for a graduate student. The student will benefit from interdisciplinary training at the crossroads of surface science, electrical and mechanical engineering and materials science. An additional pay-off is the achievement of higher reliability MEMS. The PI will continue her ongoing commitment to education, including outreach activities to underrepresented groups, undergraduate research participation in the work to be performed, public presentations on the topics of microsystems technology and surface engineering, and active involvement in curriculum development on these topics.