Wear of MEMS: Metrology, Hard Coatings and Process Integration

MEMS 磨损：计量、硬涂层和工艺集成

• 批准号: 0355339
• 负责人: Roya Maboudian
• 金额: $ 23万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0355339&HistoricalAwards=false
• 关键词: Wear; MEMS; Metrology; Hard; Coatings

There is a growing interest in developing technologies which use silicon and other electronic materials as mechanical materials. Using standard processes of the integrated circuit industry, researchers have successfully fabricated miniature mechanical components, or micromachines. The integration of miniaturized mechanical components with microelectronic components has spawned a new technology, known as microelectromechanical systems (MEMS). It promises to extend the benefits of microelectronic fabrication to sensing and actuating functions. However, given the dimensions of micromachines, surface phenomena such as adhesion, friction, and wear are principal source of yield and reliability concerns plaguing MEMS industry. These issues will persist, indeed escalate, as microsystems technologies begin to transition into the nanoscale. Recent research by us and others has successfully addressed the issue of adhesion (often termed stiction in this context). The present proposal aims to understand and overcome the problem of wear in MEMS. The proposed research is expected to result in wear-resistant processes that are compatible with the release-antistiction technology we have recently developed, to achieve the ultimate goal of robust, manufacturable, low cost MEMS devices. The impact of achieving anti-stiction, self-lubricating, wear resistant coatings in MEMS is manifold. (i) Economically, it would lead to increased lifetime, and reliability of manufactured microparts and micromachines; (ii) From the manufacturing point of view, it would lead to simplified design of micromachines with moving parts; (iii) It would also have an environmental impact via the elimination of liquid lubricants. (iv) The project will provide core training for a graduate student.

人们对开发使用硅和其他电子材料作为机械材料的技术越来越感兴趣。 使用集成电路工业的标准工艺，研究人员已经成功地制造出微型机械部件或微型机器。 微型化机械部件与微电子部件的集成已经产生了一种新技术，称为微机电系统（MEMS）。 它有望将微电子制造的好处扩展到传感和致动功能。 然而，由于微机械的尺寸，表面现象，如粘附，摩擦和磨损的主要来源的产量和可靠性的关注困扰MEMS产业。随着微系统技术开始向纳米级过渡，这些问题将持续存在，甚至升级。我们和其他人最近的研究已经成功地解决了粘附问题（在本文中通常称为静摩擦）。本提案旨在理解和克服MEMS中的磨损问题。 预计拟议的研究将导致与我们最近开发的释放抗静摩擦技术兼容的耐磨工艺，以实现坚固，可制造，低成本MEMS器件的最终目标。在MEMS中实现抗静摩擦、自润滑、耐磨涂层的影响是多方面的。 (i)从经济上讲，这将导致制造的微型零件和微型机器的寿命和可靠性增加;（ii）从制造的角度来看，这将导致具有运动部件的微型机器的设计简化;（iii）它还将通过消除液体润滑剂对环境产生影响。(iv)该项目将为一名研究生提供核心培训。