MRI: 3D Nano Manufacturing of Novel Photonic Structures

该重大研究仪器（MRI）奖为购买扫描电子显微镜和傅里叶变换红外光谱仪提供资金。该设备将用于支持三维纳米制造技术的开发以及这些技术在纳米光子结构和器件中的应用的研究。大多数具有设计功能的纳米光子结构是复杂的和三维的，因此三维纳米制造技术是必不可少的。扫描电子显微镜可以提供高分辨率的图像，傅里叶变换红外光谱仪可以测量光子结构和器件的基本光学特性。这些结构和光学性质将为纳米制造工艺的开发和优化提供重要的信息和指导。 使用该设备进行的研究是跨学科的，涉及来自不同部门的研究人员的合作努力。 这将可能导致纳米制造、光子材料和设备的科学和技术的进步。通过创造机械工程师，电气工程师和化学家的紧密环境，将通过参与这些研究活动培养具有跨学科知识和研究经验的新一代工程师。纳米制造和教育的进步将通过帮助美国保持在这个高科技行业的竞争优势，并为国家的经济和安全准备高素质的劳动力，使社会受益。

This Major Research Instrumentation (MRI) award provides funds for the purchase of a scanning electron microscope and a Fourier transformation infrared spectrometer. This equipment will be used to support research on development of three-dimensional nanomanufacturing technologies and on those technologies' applications in nanophotonic structures and devices. Most nanophotonic structures with designed functionalities are complicated and three-dimensional, therefore three-dimensional nanomanufacturing technologies are essential. The scanning electron microscope can provide images with high resolution, and the Fourier transformation infrared spectrometer can measure the essential optical properties of photonic structures and devices. These structural and optical properties will provide important information and guidance for the development and optimization of nanomanufacturing processes. The research conducted using this equipment is interdisciplinary and involves the collaborative efforts of researchers from various departments. This will likely lead to advances in the sciences and technologies of nanomanufacturing, photonic material, and devices. By creating a tight-nit environment of mechanical engineers, electrical engineers, and chemists, a new generation of engineers with interdisciplinary knowledge and research experience will be trained through participating in these research activities. The advances in nanomanufacturing and education will benefit society by helping the United States maintain a competitive edge in this high technology industry and prepare a high quality workforce for the nation's economy and security.