SGER: Distributed Control of Capacitive Micro-Cantilever Arrays

电容驱动和传感微悬臂梁阵列作为一种基本的微电子机械器件具有广阔的应用前景。我们研究了新的动力学和控制启发方案，以克服此类设备固有的两个主要问题。我们建议在间接传感方案中使用电流测量，通过使用悬臂梁的动力学模型来建立用于测量悬臂梁位移的状态估计器，从而避免了目前普遍使用的潜在的二次传感信号的破坏。我们还建议建立和控制这种悬臂梁的紧耦合阵列，其中通过使用分布式反馈环路来补偿(而不是避免)显著的悬臂梁间耦合。

Capacitively actuated and sensed microcantilever arrays have great promise as a basic micro-electro-mechanical device. We investigate novel dynamics and controls inspired schemes for overcoming two major problems inherent in such devices. We propose to use current measurements in an indirect sensing sensing scheme by using a dynamical model of the cantilever to build a state estimator for measuring cantilever displacement, thus avoiding the potentially corrupting secondary sensing signal now commonly used. We also propose to build and control tightly coupled arrays of such cantilevers where the significant inter-cantilever coupling is compensated for (rather than avoided) by using distributed feedback loops.