Piezoelectric Phononic Lattice Surface Acoustic Wave Devices on Silicon and Sapphire for Ultra-High Frequency Filters and Biomedical Sensor Applications

提出了一种基于声子晶格通带和阻带的声表面波传感器/滤波器。该器件利用ZnO材料系统的压电特性，在平面集成器件上通过声子晶格实现声波的产生/检测和传播。这项工作将探索这种器件的特性，探索声波通过声子晶格传播的实验概念，以及声子晶格在超高频滤波器应用和生物医学传感器应用中的实际能力。该建议提出了一种新型SAW型器件的开发，该器件能够通过实验探索一类人工制造的晶格的性质，声子晶格此外，本发明提供了一种能够具有超高频响应的功能器件，其适合于开发安全的移动的通信系统和高性能的声学、气体和生物免疫传感器。由于该装置的新奇和潜在应用，知识产权价值被认为非常高。该设备将彻底改变无线和移动的通信系统，因为它可以实现超高频带通滤波器，此外，这种高得多的工作频率的能力将导致具有更高选择性和探测性的传感器的发展。例如目前使用石英微量天平进行免疫传感的那些，对病原体和其它生物危害的检测具有巨大的影响。

A novel surface acoustic wave (SAW) sensor/filter device based on the "pass" and "stop" frequency bands of phononic lattices is proposed. The device uses the piezoelectric properties of the ZnO material system, in order to achieve the generation/detection, and propagation of acoustic waves through phononic lattices on a planar integrated device. The work will explore the properties of such device, explore the concept of acoustic wave propagation through phononic lattices experimentally, and the practical capabilities ofphononic lattices for ultra-high frequency filter applications and biomedical sensor applications.Intellectual Merit: This proposal addresses the development of a novel SAW type device that is capable of exploring experimentally the properties of a class of artificially made lattices, the phononic lattices. Furthermore, it provides a functional device capable of ultra-high frequency response suitable for developing secure mobile communication systems and high performance acoustic, gas, and bio-immunosensors. Due to the novelty and potential applications of the device intellectual merit is considered very high.Broader Impacts: This device will revolutionize wireless and mobile communication systems as it can achieve ultra-high frequency band pass filters, and furthermore, this capability of substantially higher operational frequencies will lead to the development of sensors with much higher selectivity and detectivity, such as those currently using quartz microbalance for immunosensing, with tremendous implications on the detection of pathogens and other bio-hazards.