SBIR Phase II: Atmospheric Pressure Microplasma Emission Spectrometer

这项小型企业创新研究（SBIR）二期研究项目将开发一种微型大气压等离子体光谱仪，该光谱仪使用一种产生高度受限、高密度放电（kW/cm3）的源。该源将基于高频环形谐振器结构，并将利用低成本的广泛可用的IC功率放大器和驱动器，在中等批量生产中将具有极低的成本，并且将消耗2w射频功率，允许便携式操作。这种放电的紧凑尺寸应该允许直接耦合到光纤光谱仪和强光发射。这项研究将大大增加科学知识基础，并导致对这些高功率密度，小型和高度非平衡等离子体的物理和工程的基本理解。这里要开发的源技术将使各种化学和气体分析技术小型化。该技术通过大幅降低成本（10-100倍），外形尺寸（100倍）和分析设备的便携性，将为工业环境中的客户提供经济效益，提高工人和工作场所的安全性，并允许更广泛的环境监测。

This Small Business Innovation Research (SBIR) Phase II research project will develop a miniature atmospheric pressure plasma spectrometer using a source which generates a highly confined, high-density discharge (kW/cm3). The source would be based on a high frequency ring resonator structure and would utilize low cost widely available IC power amplifiers and drivers, would have extremely low cost in moderate volume production, and would consume 2 W rf power, allowing for portable operation. The compact size of this discharge should allow straightforward coupling to fiber optic spectrometers, and intense optical emission. This research will substantially add to the scientific knowledge base and lead to fundamental understanding of the physics and engineering of these high-power-density, small and highly non-equilibrium plasmas. The source technology to be developed here will enable the miniaturization of a variety of chemical and gas analysis technology. This technology, by dramatically lowering the cost (10-100x), form factor (100x), and portability of the analytical equipment will provide economic benefits to customers in industrial settings, enhance worker and workplace safety, and allow for wider environmental monitoring.