Acquisition of a plasma-enhanced-chemical-vapor-deposition cluster tool for photovoltaics and large area electronics

研究目标和方法本提案的目的是获得先进的等离子体增强化学气相沉积系统，用于支持南达科他州州立大学和南达科他州的光化学领域的研究项目。这种方法是根据拟议研究项目的要求设计系统，并由制造商建造和安装。知识产权由于光伏发电的成本高昂，以及清洁和可持续能源对人类未来的重要性，开发具有降低成本潜力的光伏技术的研究非常重要。PI参与发起和开展具有成本效益的光化学领域的几项研究。这些包括1）新一代基于晶片的硅太阳能电池，2）高效柔性薄膜太阳能电池，3）VI族薄膜合金的结构优化，以及4）有机/无机混合太阳能电池。新仪器将支持超过12个正在进行的和拟议的跨学科研究项目在上述研究领域。更广泛的影响这台仪器将支持在南达科他州的三个主要研究机构的研究和教学活动，在NSF-EPSCoR支持的光敏纳米系统集群，新的博士学位。在南达科他州州立大学的Photoprophics项目，以及来自当地行业的项目。PI将在他的研究生课程中整合和教授氢化硅薄膜的合成和表征。该系统将用于演示薄膜沉积高中学生在洁净室图尔斯之旅。

Research Objectives and ApproachesThe objective of this proposal is to acquire an advanced plasma-enhanced chemical-vapor-deposition system for supporting research projects in the fields of photovoltaics at the South Dakota State University and State of South Dakota. The approach is to design the system based on the requirements of the proposed research projects and have it built and installed by the manufacturer.Intellectual MeritDue to the high cost of photovoltaic electricity and the importance of a clean and sustainable energy for the future of mankind, research on developing photovoltaic technologies with cost-reduction potential is of great importance. The PI is involved in initiating and conducting several research tracks in the field of cost-effective photovoltaics. These include 1) new generation of wafer based silicon solar cells, 2) high efficiency flexible thin film solar cells, 3) structural optimization of group-VI thin film alloys, and 4) organic/inorganic hybrid solar cells. The new instrument will support over 12 ongoing and proposed interdisciplinary research projects in the previously mentioned research fields.Broader ImpactsThis instrument will support the research and teaching activities at the three major research institutes in the State of South Dakota, the NSF-EPSCoR supported Photoactive Nanoscale Systems cluster, the new Ph.D. program in Photovoltaics at South Dakota State University, and projects from local industries. The PI will integrate and teach the synthesis and characterization of hydrogenated Si thin films in his graduate level courses. The system will be used to demonstrate thin film deposition for high school students during cleanroom tours.