III Nitride NEMS Devices for Chemical and Biological Sensing

[摘要]美国俄亥俄州立大学（ohio State university）陆吴教授，本项目旨在利用纳米束机械谐振器的激励，通过受体与目标分析物之间特定结合的质量或表面能变化来调制，开发GaN纳米机电系统（NEMS）生物传感器。NEMS生物传感器将与芯片上的低噪声放大器集成，用于微流控平台上的信号放大。为了提高器件灵敏度，自由悬浮梁谐振器和垂直梁谐振器将采用压电材料，即AlGaN/GaN异质结构。所提出的NEMS设备有望成为传感器应用的极快和超高灵敏度设备，例如由于特定分析物结合而产生的位移和电荷检测。超灵敏的NEMS传感器可以找到各种应用，从食品安全，国土安全到人类健康保健的疾病诊断。将作出特别努力，招收女性和人数不足的少数民族研究生和本科生参加这项跨学科研究。拓展活动包括学校参观、夏令营和高中高年级学生培训。

Abstract 0928888Wu LuOhio State UniversityThis project aims to develop GaN nanoelectromechanical system (NEMS) biosensors utilizing the excitation of nanoscale beam mechanical resonators modulated by the mass or surface energy change of specific binging between receptors and target analytes. The NEMS biosensors will be integrated with an on-chip low noise amplifier for signal amplification on a microfluidic platform. To improve the device sensitivity, piezoelectric materials, namely, AlGaN/GaN heterostructures will be used for freely suspended beam resonators and vertical beam resonators. The proposed NEMS devices promise to be extremely fast and ultrahigh sensitive devices for sensor applications such as displacement and charge detection due to specific analyte binding. The ultra-sensitive NEMS sensors can find various applications from food safety, homeland security to disease diagnostics for human health care. Special efforts will be made to recruit female and underrepresented minority graduate and undergraduate students for participation of this interdisciplinary research. Outreach activities include school visits, summer camp and training of high school senior students.