MRI-R2: Acquisition of a Direct Write Electron Beam Lithography System for Exploring Mesoscale Science, Materials, and Devices

该奖项是根据2009年《美国复苏和再投资法案》(公法111-5)提供资金的。目的：在几十个原子中控制和操纵物质的能力使研究人员能够研究以量子力学为主的原子尺度和整体尺度之间的制度。这种能力的可获得性对于正在制造设备或研究这些规模的物理效应的学术和工业研究人员的成功至关重要。该项目通过购置高分辨率电子束光刻系统来满足这一需求。智力优势：明尼苏达大学在磁学、中尺度超导、纳米电子学、纳米机电系统、量子点设备、纳米成像、表面增强拉曼等领域进行前沿研究。所有这些工作在很大程度上依赖于写出极细线条的能力。这项提案寻求为明尼苏达纳米制造中心(NFC)购买100keV场发射电子束光刻系统的资金。NFC通过来自全国各地的创新项目支持庞大且不断增长的用户群体，并已证明其有能力为其用户群运营和维护复杂的系统。广泛影响：明尼苏达州是美国国家科学基金会-S国家纳米基础设施网络的关键节点，去年拥有600多名用户。加强对这些科研人员的研究生教育将会产生重大影响。NFC也是Nano-Link的中心枢纽，Nano-Link是一个地区纳米技术AAS教育中心。拟议的工具将被用作Nano-Link工作的一部分，以演示技术教育专业人员可以很容易理解的尖端图案定义和量子效应。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5). Objective: The ability to control and manipulate matter at a few tens of atoms allows researchers to investigate a regime between the atomic-scale where quantum mechanics dominate and the bulk-scale. The availability of this capability is critical to the success of both academic and industrial researchers who are making devices or studying physical effects at these scales. This project addresses this need through the acquisition of a high resolution electron-beam lithography system. Intellectual Merit: The University of Minnesota is conducting leading edge research in magnetics, mesoscale superconductivity, nanoelectronics, nano electromechanical systems, quantum dot devices, nano scale imaging, surface enhanced Raman, and other areas. All of this work is critically dependent on the ability to write extremely fine lines. This proposal seeks funding for the acquisition of a 100 keV field-emission electron-beam lithography system for the Minnesota Nano Fabrication Center (NFC). NFC supports a large and growing group of users with innovative projects from across the nation and has proven its ability to operate and maintain complex systems for its user base.Broader Impacts: Minnesota is a key node in NSF?s National Nano Infrastructure Network with more than 600 users last year. Enhancing graduate education of these researchers will be a major impact. NFC is also a central hub for Nano-Link, a regional center for nanotechnology AAS education. The proposed tool will be used as part of the Nano-Link effort to demonstrate cutting edge pattern definition and quantum effects that can be readily understood by technical education professionals.