Six-Axis Visual Sensing and Visual Servo Control Rendering Direct Metrology for Manipulation of Multiple Micro Objects

该奖项的目的是表征在配备干涉仪的光学显微镜下施加在物体表面的干涉条纹的形成，并推导出用于面外运动估计的解析三自由度条纹图像模型和面内运动估计的扭曲阴影投影模型。拟议的办法包括三项活动。首先，提出了一种连续位移图像模型，实现了图像的无偏实时配准；本文将研究其在六轴视觉感知中扭曲图像模式匹配中的应用，以实现超精确的运动跟踪。其次，实现六轴视觉感知的单一软件模块，支持多种可变视觉传感器，包括各种物镜和相机。与配备干涉仪的光学显微镜一起，它们形成了一个六轴视觉传感系统。第三，利用视觉传感系统实现六轴视觉伺服控制，为多个微物体的操作提供直接计量。由于视觉传感器的坐标系与目标空间重合，所提出的视觉伺服控制消除了运动误差的影响，并持续补偿由相互作用力和/或热漂移引起的时变不确定性。如果成功，该奖项创造的技术创新将为制造业开辟重要的新研究应用。六轴视觉传感系统可以作为反馈传感器来控制各种运动控制阶段，测量探头和机械手的运动，用于广泛的应用，包括自动对准，工具-样品接合，动态跟踪和控制操作。它可以很容易地重新配置，以执行各种应用程序的功能范围，涉及的组件范围从几毫米到几微米。它代表了视觉传感和视觉伺服控制如何在超精密计量和操作中使用的转型变化。

The objective of this award is to characterize the formation of interference fringes imposed on an object surface under an interferometer-equipped optical microscope and to derive an analytical three degree-of-freedom fringe image model for out-of-plane motion estimation and a warped shadow projection model for in-plane motion estimation. The proposed approach consists of three activities. First, a continuously shifting image model is proposed to achieve unbiased real-time image registration. Its application to pattern matching of warped images employed in six-axis visual sensing will be investigated to enable ultra-precise motion tracking. Second, a single software module that realizes six-axis visual sensing will be implemented to support multiple changeable vision sensors, including various objective lenses and cameras. Together with an interferometer-equipped optical microscope, they form a six-axis visual sensing system. Third, the visual sensing system will then be employed to achieve six-axis visual servo control that renders direct metrology for manipulation of multiple micro objects. Since the visual sensor's coordinate system coincides with the object space, the proposed visual servo control eliminates the effect of kinematic errors and continuously compensates for time varying uncertainties induced by interacting forces and/or thermal drifts. If successful, technological innovations created from this award will open up important new research applications in manufacturing. The six-axis visual sensing system can serve as a feedback sensor to control the motion of various motion control stages, measurement probes, and manipulators for a wide spectrum of applications, including automatic alignment, tool-sample engagement, dynamic tracking, and controlled manipulation. It could be readily reconfigured to perform a breadth of functions for a variety of applications involving components that range in size from a few millimeters down to several micrometers. It represents a transformational change in how visual sensing and visual servo control can be used in ultra-precise metrology and manipulation.