SNM: Scalable Nanomanufacturing Machine Based on Parallel Optical Antenna Array

这项可扩展的纳米制造（SNM）赠款为开发高通量，可扩展的纳米制造机器提供资金，用于并行纳米光刻和纳米材料和设备的并行制造。 近二十年来的研究表明纳米材料和器件具有上级性能。然而，用于生产基于纳米材料的装置的技术遭受低产量。为了将纳米科学和技术的进步带给社会，需要可扩展到经济和工业相关生产水平的纳米制造方法。这台机器将大大扩展商业机器在高吞吐量，高分辨率和高精度制造方面的能力，并将成为第一台能够并行纳米光刻和并行纳米材料合成的商业规模制造机器。该机器的开发将基于使用纳米光学天线进行纳米制造的进展。纳米级天线产生高强度的局部光斑;天线阵列用于并行纳米制造。为了合成纳米材料，来自天线的局部化能量将创建局部化的化学反应环境，用于在精确位置生产纳米材料，为使用标准半导体制造工具进行设备制造做好准备。如果成功，该项目将产生一个独特的和第一个同类机器的纳米光刻和制造的纳米材料，可以很容易地用于开发多种类型的纳米/多尺度设备。这种商业高通量纳米制造机的开发将使纳米器件的制造在经济和工业相关的生产水平，这将影响工业中的每个部门。该项目将解决对机器开发至关重要的基础和工程挑战，包括纳米光学，在线计量，制造工程和系统集成。该项目还将推动相关科学和工程的发展。将光高效聚集到纳米点的能力不仅对纳米制造业产生了重大影响，而且对科学和技术的其他领域也产生了重大影响，从生物/化学传感到下一代数据存储。该项目还将为研究生和本科生，包括代表性不足群体的学生提供跨学科领域的培训，并通过工业实习获得工业经验。本科生将通过普渡大学本科研究奖学金计划招募到该项目。研究成果将作为新的模块或特殊主题引入一些课程和本科高级设计项目，并将通过普渡大学外展计划推广到高中学生。因此，该项目将对人力资源开发产生更广泛的影响。

This Scalable NanoManufacturing (SNM) grant provides funding for the development of a high throughput, scalable nanomanufacturing machine for parallel nanolithography and parallel manufacturing of nanomaterials and devices. Research in the past two decades has demonstrated superior properties and performances of nanomaterials and devices. However, technologies for producing nanomaterial-based devices suffer from low throughput. To bring the advances in nano-science and technology to society, nanomanufacturing methods scalable to economically and industrially relevant production levels are needed. This machine will greatly expand the capability of commercial machines in terms of high throughput, high resolution, and high precision manufacturing, and will be the first commercial scale manufacturing machine capable of both parallel nanolithography and parallel nanomaterials synthesis. The development of the machine will be based on advances in using nanoscale optical antennas for nanomanufacturing. The nanoscale antenna produces high intensity, localized light spot; and an array of antennas is used for parallel nanomanufacturing. To synthesize nanomaterials, the localized energy from antenna will create localized chemical reaction environment for producing nanomaterials at precise locations, ready for device fabrication using standard semiconductor manufacturing tools. If successful, the project will result in a unique and first of its kind machine for nanolithography and for manufacturing of nanomaterials that can be readily used for developing many types of nano/multi-scale devices. The development of such a commercial high throughput nanomanufacturing machine will enable manufacturing of nanoscale devices at economically and industrially relevant production levels, which will impact every sector in industry. The project will address fundamental and engineering challenges critical for the development of the machine, including nano-optics, on-line metrology, manufacturing engineering, and system integration. The project will also advance the relevant science and engineering. The ability to concentrate light into a nanometer spot with high efficiency has significant impact not only on nanomanufacturing but also on other areas in science and technology, from biological/chemical sensing to next-generation data storage. The project will also provide graduate and undergraduate students, including students from under-represented groups with trainings in interdisciplinary areas and industrial experience through internships in industry. Undergraduate students will be recruited to the project through Purdue undergraduate research fellowship programs. Research results will be introduced as new modules or special topics in a number of courses and undergraduate senior design projects, and will be outreached to high school students through Purdue outreach programs. Therefore, this project will have broader impacts on human resource development.