MRI: Acquisition of a sputtering deposition system to expand science and engineering research at Utah State University

几纳米厚的各种金属和绝缘材料的薄膜广泛用于器件和传感器。 目前，犹他州州立大学（USU）是一所拥有28，000多名学生的赠地大学，但没有能够在4英寸晶圆上进行均匀薄膜沉积的薄膜沉积系统。现有的小型蒸发器只能存款低熔点金属，如铝和金，这一事实严重限制了犹他州州立大学的研究能力。 本提案旨在获得一种先进的溅射沉积系统，该系统将提供关键的改进，包括：（1）用于4英寸晶片的衬底保持器，（2）高达800 °C的衬底加热器，（3）足够的功率以溅射高熔点金属，磁性材料和介电材料，以及（4）用于提高产量和膜质量的装载锁。拟议的溅射沉积系统将使广泛的资助变革研究在USU包括：（1）基于碳纳米管的辐射计测量辐射监测全球变暖和校准激光功率前所未有的准确性。(2)将催化纳米颗粒沉积在图案化的碳纳米管侧壁上，用于捕获二氧化碳，以帮助缓解气候变化并转化为有用的化学品，如甲醇。(3)沉积石墨烯和生长石墨烯图案，用于制造下一代认知无线通信的智能天线。(4)制造氧化钛奈米结构以研究奈米形貌对细胞行为的影响。(5)沉积钴磷薄膜以强化高能量密度化学燃料之电催化分解水。(6)沉积镍及氧化铝薄膜以研究奈米粒子借固-液界面不稳定性自组装于光电子学及磁性资料储存。(7)沉积各种氧化物和碳化物薄膜，研究多层样品中的充电、沉积和电子传输，以减轻静电放电对航天器和电网的损害。 将支持更多的创新研究，因为该工具仅受地球仪供应商提供的目标的限制。这一工具的更广泛的影响应通过与NDL其他工具的协同作用来评估。拟议的溅射镀膜机将被集成到NDL，这一直服务于工程和科学学院至少5个系的教师的研究需求。来自6个主要研究小组的大约30名研究生和本科生预计将接受培训，并使用NDL的其他工具进行研究。 该工具还计划参与4个工程类的顶点和高级研究项目（约20名学生/年）和两个微加工类的实验室模块（约30名学生/年）。 除了为大学生提供高级培训外，NDL还参加了USU各单位组织的许多活动，向公众传播新的科学和技术。 拟议的工具带来的扩大的研究能力也将有助于印度-行业伙伴关系，例如现有的SBIR和STTR计划与博克斯埃创新，LAM研究，球航空航天和轨道科学等。

Thin films of various metallic and insulating materials of a few-nanometer thick are widely used in devices and sensors. At present, Utah State University (USU), a land-grant university of more than 28,000 students, has no thin film deposition system that can perform a uniform thin-film deposition across a 4-in wafer. The fact that the existing small evaporator can only deposit low-melting point metals, such as aluminum and gold, severely limits the research capability at Utah State University. This proposal is to acquire an advanced sputtering deposition system which will provide crucial improvements include: (1) substrate holder for a 4-in wafer, (2) substrate heater up to 800 °C, (3) sufficient power to sputter high-melting point metals, magnetic materials, and dielectric materials, and (4) a load-lock to improve through-put and film quality. The proposed sputtering deposition system will enable a broad range of funded transformative research at USU including: (1) carbon-nanotube-based radiometer for unprecedented accuracy on measuring radiation for monitoring global warming and calibrate laser power. (2) Depositing catalytic nano-particles on patterned carbon-nanotube sidewalls for CO2 capture to help mitigate climate changes and conversion to useful chemicals such as methanol. (3) Depositing dielectrics and growing graphene patterns for the fabrication of intelligent antennas for next generation of cognitive wireless communication. (4) Fabricating titanium oxide nano-structures to investigate cell behavior affected by nanotopography. (5) Depositing thin film of cobalt and phosphorous to enhance electrocatalytic water splitting for high-energy-density chemical fuels. (6) Depositing nickel and alumina thin films to investigate nanoparticles self-assembled by solid-liquid interface instability for optoelectronics and magnetic data storage. (7) Depositing various oxide and carbide thin films to investigate electrical charging, deposition and electron transport in multi-layered samples to mitigate electrostatic discharge damage to spacecraft and power grid. More innovative research will be supported since the tool is only limited by the targets available from suppliers around the globe. The broader impacts of this tool should be assessed by the synergy with other tools at NDL as a whole. The proposed sputter coater will be integrated into NDL which has been serving the research needs of faculty from at least 5 departments in Colleges of Engineering and Science. Approximate 30 graduate and undergraduate students from the 6 profiled major research groups are expected to be trained and using this tool with other tools at NDL for their research. This tool is also planned to be involved in the capstone and senior research projects (~20 students/yr) in 4 engineering classes and a laboratory module for two microfabrication classes (~30 student/yr). In addition to offering advanced training for university students, NDL participates in many activities organized by various units of USU for disseminating new science and technology to the general public. The expanded research capability brought by the proposed tool will also help academia-industry partnership such as the existing SBIR and STTR programs with Box Elder Innovations, LAM Research, Ball aerospace, and Orbital Sciences, among others.