Metal-organic framework chemical-sensitive field effect transistor for highly selective gas sensing

对小型化、低功耗气体传感器的需求很大，这些传感器可以广泛部署在无线应用中，以改善环境保护、公共健康以及许多工业过程的安全高效运行。该提案旨在开发这种传感器，用于敏感和选择性地检测环境温度下的温室气体，如甲烷和二氧化碳。由于其相对惰性的性质，温室气体在室温和低功率下极难检测到。更具体地说，将开发一种基于晶体管的设备，采用一种称为金属有机框架的新型多孔材料系统。这些新型化学物质将被设计成选择性地与目标气体结合。这项工作的更广泛影响在于它对其他科学领域、社会及其教育和推广活动的影响。更广泛地说，这些见解将影响许多使用mof的学科和技术，例如气体分离和二氧化碳封存；拟议的设备设计有可能破坏许多传感应用，例如工作场所安全和空气质量监测。对人力资源发展也有重大影响。该项目将为研究生和本科生提供核心培训，他们将受益于电气工程、表面化学和材料科学交叉学科的跨学科培训。这一提议的核心是基于化学门控场效应晶体管的新器件架构，它可以在室温下工作，与集成电路制造技术兼容，并且可以通过适当的化学敏感栅极功能化来呈现极具选择性。金属有机骨架（MOFs）已被确定为功能元素，因为它们对气态物质具有极强的选择性。特别是，该提案旨在展示超低功耗，芯片级的温室气体气体传感。所提出的工作的智力价值在于新颖的设计架构和介电层和化学敏感层的新材料的选择。从基本的角度来看，所提出的研究将允许理解和预测影响超薄mof生长的因素，实现其在电子微器件中的集成，并优化材料和设计，以增强化学传感。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

There is a high demand for miniaturized, low-power gas sensors that can be widely deployed in wireless applications for improved environmental protection, for public health, and for safe and efficient operation of many industrial processes. This proposal seeks to develop such sensors for the sensitive and selective detection of greenhouse gases, such as methane and carbon dioxide at ambient temperatures. Due to their relatively inert nature, greenhouse gases are extremely hard to detect at room temperature and hence at low power. More specifically, a transistor-based device will be developed employing a new class of porous material systems called metal-organic-frameworks. These novel chemicals will be engineered to bind selectively to the target gases. The broader impact of this work lies in its impact on other scientific fields, on society and in its educational and outreach activities. More broadly, insights will impact many disciplines and technologies using MOFs, such as gas separation and CO2 sequestration; proposed device designs have the potential to disrupt many sensing applications, such as workplace safety and air quality monitoring. Additional significant impact is on human resource development. The project will provide core training for graduate and undergraduate students who will benefit from interdisciplinary training at the crossroads of electrical engineering, surface chemistry, and materials science.This proposal is centered on a new device architecture based on chemically gated field effect transistors, which can operate at room temperature, are compatible with integrated-circuit fabrication techniques, and can be rendered extremely selective by suitable functionalization of the chemically sensitive gate. Metal organic frameworks (MOFs) have been identified as the functional element for their demonstrated extreme selectivity to gaseous species. In particular, this proposal aims to demonstrate ultra-low power, chip-scale gas sensing of greenhouse gases. The intellectual merit of the proposed work lies both in the novel design architectures and in the selection of new materials for the dielectric and the chemically sensitive layers. From a fundamental point of view, the proposed research will allow understanding and predicting the factors affecting the growth of ultrathin MOFs, to achieve their integration in an electrical microdevices, and to optimize materials and designs for enhanced chemical sensing.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.