Nanopatterning of functional materials by transfer of nanoimprint-guided ordered block copolymer structures by means of reactive ion beam etching

为了在各种技术领域中经济地利用纳米结构，在微电子学之外，也需要简单而快速的技术来在功能材料中生产纳米结构。自组织过程基本上为这一目的提供了适当的前提条件；然而，关于与传统微技术结构程序的结合、有序度的提高以及结构向目标材料的转移等问题仍有待回答。因此，该项目的目的是通过纳米印迹在平面衬底上的嵌段共聚物(BCP)层中引导纳米结构的自组织。以这种方式，BCP的纳米结构组织同时与印记印记的微结构和/或亚微结构相连。用于此目的的印记印章可以多次重复使用，这使得传统的图形和化学外延中所必需的每个单独衬底的预结构化是多余的。此外，除了地形结构外，邮票还可以具有化学结构。我们的目标是确定一种快速排序过程，该过程从邮票表面开始，导致有序的圆柱形和片状BCP结构。这一目的所需的BCP的流动性是通过小心地添加溶剂和/或高工艺温度来实现的；温度梯度、热循环和电场支持引导排序。当实现邮票引导的自组织时，这取代了每个衬底的纳米结构，从而实现了简单而快速的过程。利用反应离子束支撑技术，在表面区域垂直排列的BCP结构被适当地装饰，并通过多步工艺转移到工艺衬底上。

For the economic utilization of nanostructures in various technical fields also outside microelectronics simple and fast techniques are required to produce them in functional materials. Self-organizing processes basically offer suitable pre-conditions for this purpose; however, questions regarding the combination with conventional micro-technical structuring procedures, the improvement of the degree of ordering as well as the transfer of the structures into the target material still have to be answered. The purpose of the project therefore is the guided self-organization of nanostructures in block-copolymer (BCP) layers on plane substrates by means of nanoimprint. In this way the nanostructure organization of the BCPs is simultaneously linked with the microstructures and/or sub-microstructures of the imprint stamp. The imprint stamps employed for this purpose can be re-used several times, which makes the pre-structuring of each individual substrate, as it is necessary in conventional grapho- and chemo-epitaxy, superfluous. Additionally to a topographic structuring the stamps can have a chemical structuring. The objective is to identify a fast ordering process, which - starting from the stamp surface - leads to ordered cylindrical and lamellar BCP-structures. The mobility of the BCPs required for this purpose is achieved by a careful addition of solvent and/or high process temperatures; temperature gradients, thermal cycling and electric fields support the guided ordering. When a stamp-guided self-organization is realized, this replaces the nanostructuring of each substrate and thus enables a simple and fast process. The BCP-structures that are vertically-ordered in the surface region are suitably decorated and transferred to technical substrates in a multi-step-process by means of reactive ion-beam supported techniques.