Fundamental investigations of the temperature-dependent self-organization of PECVD- and PVD-TiSiBCN thin films

随着人们对提高热成形工具使用寿命的要求越来越高，针对高温加工的新型和创新的耐磨涂层系统已成为强制性要求。锻造或压铸等热成形工艺的特点是在具有交变应力的高热工艺温度下循环、提高机械载荷。同时，由于材料的转移，刀具表面产生了较高的摩擦学应力。为了保持零件的经济生产，并进一步提高对刀具表面的要求，需要新的涂层材料。由过渡金属钛的碳化物、氮化物、硼化物或硅化物生成的纳米结构多相涂层确实具有这些特性。目前，由二元或三元组成的涂层被用来减少摩擦磨损。例如，TiN、TiC、TiB2或TiCN、TiBN是常用的，但其关于降解和氧化的热性能有限。这些涂层系统有望扩展硅和/或碳元素，以合成可在高热负荷条件下(700-1000°C)使用的四元或五元涂层系统。初步研究表明，这些由PVD或PACVD涂层技术生产的涂层系统在给定的载荷条件下被认为是非常有效的减少磨损的方法。它们似乎能够在纳米尺度上改变其结构组成的同时，保持甚至优化其机械性能。这项建议旨在利用PVD和PECVD技术，对不同生成的涂层在高热负荷下的所述涂层性能进行原位分析。实验室条件下的摩擦学研究将揭示涂层的好处。在项目结束时，将有发现解释如何设计多相涂层系统以有效减少热成形应用中使用的工具的磨损。

With increasing demands for an enhanced service life time of tools used in the field of hot forming, new and innovative wear protecting coating systems for high process temperatures are mandatory. Hot forming processes like forging or die casting are characterized by cyclic, elevated mechanical loads under high thermal process temperatures with alternating stresses. At the same time, high tribological stresses are generated at the surface of the tools due to the material transfer. In order to maintain an economical production of parts and to further enhance the requirements for the tool surfaces, new coating materials are needed. Nanostructured multiphase coatings, generated from carbides, nitrides, borides or silicides of the transient metal titanium do provide these properties.Currently, coatings consisting of binary or ternary compositions are used to reduce tribologically caused wear. For example, TiN, TiC, TiB2 or TiCN, TiBN are commonly used, yet limited in their thermal properties concerning degradation and oxidation. These coating systems are expected to expand the elements silicon and/or carbon to synthetize quaternary or quinary coating systems, which are utilized under high thermal load conditions (700-1000°C). Preliminary investigations show that these coating systems, produced by PVD or PACVD coating technologies are considered to be very efficient to reduce wear under the given load conditions. It seems as if they are capable to preserve or even optimize their mechanical properties while changing their structural composition in nanoscale dimensions. This proposal aims to investigate the described coating properties with analytical methods in-situ under high thermal loads for differently generated coatings by means of PVD and PECVD techniques. Tribological investigations under laboratory conditions will reveal the benefits of the coatings.At the end of the project, finding will be available that explain how multiple phase coating systems are to be designed to effectively reduce wear for tools used in hot forming applications.