Creation of Ultraprecision Micro Parts with High Aspect Ratio and Complex Shape and its Application

研究了利用多轴控制超精密加工中心制造高、小、复杂形状的高纵横比超精密微型零件的方法。高宽高比的形状通常很难制作。创建这种形状的可能性可能会导致应用到新的领域。在前一年，利用各种金刚石工具，建立了微梯形槽、长度为1mm、纵横比为40的圆柱和棱柱形零件等基本形状创造技术。今年，创造了以下形状：(1)由多个圆柱和棱柱组成的高纵横比微针阵列；(2)作为下一代步进器光学系统的镜段阵列；(3)形状复杂的微佛头。对于每一项，研究总结如下：(1)基于不再与已加工零件接触的方式产生的刀具轨迹，可以使用旋转金刚石刀具加工9针微针阵列。由于需要花费大量时间，因此需要金属成型技术来生产这种形状。因此，尝试了电镀成型，但很难达到均匀的电镀。(2)镜段阵列，表面粗糙度为1 nm，由一系列1mm* 15mm的镜段组成，从半径为660 mm的球体的不同位置切割。采用5轴控制加工，加工半径约为660mm的工件，表面粗糙度为10 nm。需要进一步改进。(3)基于佛头形状数据，在考虑刀具碰撞的情况下，对直径约3mm的佛头进行了五轴控制加工。形状成功完成，但由于刀具设置困难，表面上有过切零件。

The study deals with the creation method of ultraprecision micro parts with high aspect ratio and complex shape, i.e. tall, small and complex shape, by making use of a multi-axis control ultraprecision machining center. The shape with high aspect ratio is usually difficult to create. The possibility of creating such a shape may lead to the application to new fields. In the previous year, the fundamental shape creation technology such as micro trapezoid groove, cylinder and prismatic parts of 1 mm in length with aspect ratio of 40, etc. was established by use of various kinds of diamond tools. This year, the following shapes were created; (1) micro pin array consisting of several cylinders and prismatic parts with high aspect ratio, (2) mirror segments array as an optical system for the next generation stepper and (3) micro Buddha head with complex shape. With regard to each item, the study is summarized as follows:(1) Micro pin array with 9 needles could be machined with a rotational diamond tool, based on the tool path generated by the way of not making contact any more with already machined portions. The metal molding technology is required to produce such a shape since it takes much time to create it. Thus, the electro plating was tried for molding, however the uniform electro plating was difficult to achieve.(2) Mirror segments array, whose surface roughness is 1 nm, consists of a series of 1mm* 15mm segment being cut from different positions of the sphere of 660 mm in radius. With 5-axis control machining, the segments of about 660mm in radius were machined, however the surface roughness was 10 nm. Farther improvement is required.(3) Based on the shape data of Buddha bead, 5-axis control machining of Buddha head of about 3 mm in diameter was carried out, taking account of tool collision. The shape was successfully completed, however has overcut parts on the surface due to the difficulty of tool setting.