LASER ULTRASONIC MICROMANIPULATION

在这项研究中，我们研究了一种高性能的激光超声微机械臂（LUMM），其中声辐射力和光辐射力作为互补的非接触力，超声波微操作用于液滴加工。本研究于2003年4月至2004年3月进行，为期2年。得到了以下结果和展望。1)在压电衬底上的单向数字间电极上激发板波（Lamb波）。探讨了利用板波辐射力和激光束辐射力互补实现操纵的可能性。2)利用6MHz频段的Lamb波在压电基板上进行液滴的一维输运实验，并考察其在微流体领域的应用可能性。3)实验制作了利用UV胶粘剂技术在玻璃基板上放置12个楔形换能器的结构机械手。在SAW的5.6MHz频率下，换能器的输入功率为37dBm，在玻璃基板的xy方向上成功地进行了约7ml蒸馏水的二维操作实验。4)利用视觉反馈控制成功实现了液滴的二维操纵。5)考察了操作过程中液滴的温升。实验结果表明，温升低于已有报道的50MHz频段的实验。部分研究结果发表在日本电气工程师学会第32届机电研讨会上。并于2005年9月在荷兰举行的IEEE超声技术研讨会上发表。研究将在本研究结果的基础上继续进行。

In this study, we have studied a high performance laser ultrasonic micromanipulator (LUMM), in which the acoustic radiation force and optical radiation force are both used as complementary noncontact forces, and ultrasonic micromanipulation for use in liquid droplet processing. This study was carried out for 2 years from April, 2003 by March, 2004. The following results and prospects were obtained.1) The plate wave ( Lamb wave ) was excited in unidirectional interdigital electrode on piezoelectric substrate. The possibility of a realization of the manipulation which used radiation force of the plate wave and radiation force of laser beam complementarily was examined.2) One-dimensional transport experiment of the liquid droplet was carried out using the Lamb wave of the 6MHz band excited on piezoelectric substrate, and the application possibility to microfluidics was examined.3) The manipulator of the structure which placed 12 wedge type transducers on glass substrates using UV adhesive technology was produced experimentally. At 5.6MHz frequency of the SAW and input power 37dBm of the transducer, it succeeded in the experiment on the two-dimensional manipulation which transports distilled water droplet of about 7ml on glass substrates in the xy direction.4) Two-dimensional manipulation of the liquid droplet using the visual feedback control has been successfully achieved.5) The temperature rise of the droplet in the manipulation was examined. The experimental result showed that temperature rise was lower than the experiment on 50MHz band already reported.The part of these results was presented in the Inst. of Electrical Engineers of Japan 32nd EM symposium. And, it has submitted in IEEE Ultrasonics Symposium held in the Netherlands in September, 2005. The research will be continued on the basis of the result obtained through this study.