FIB-SEM (Focused Ion Beam Scanning Electron Microscope)

FIB-SEM（聚焦离子束扫描电子显微镜）将被整合到TUM新创建的EM设施中，并跨学科（化学，物理，生命科学，医学，电池和材料研究）和TUM各基地（Garching, Munich， Weihenstephan和Straubing）进行多学科研究，研究生物系统中的结构-功能关系，如细胞，组织和土壤样品，以及电池材料和金属材料。不幸的是，目前在TUM还没有这样的工具。该仪器独特地使层析成像和电子显微镜结合在各种样品系统上。使用FIB-SEM，除了表面分析外，还可以进行断层扫描。这开辟了复杂样品系统的三维测量。这些包括细胞（人类、动物、植物）、组织和类器官，以及土壤微团聚体和复合系统（例如真菌-木材）。该仪器还可以进行电化学和金属材料的地形表征和功能测试。这种广泛的应用对系统的技术组件、灵活性和健壮性提出了很高的要求。该仪器还将通过相关图像评估作为各种光学显微方法之间的接口，在连接最先进的成像技术方面发挥核心作用。使用FIB的顺序铣削功能对于物体的三维成像至关重要。此外，它可以制备薄片，然后可以以更高的分辨率成像。相同对象的比较光显微镜可以用来预先选择感兴趣的目标体积，以大大提高效率。此外，还可以对不同元素的分布进行成像。因此，提议的FIB-SEM仪器可以为TUM EM设施提供急需的多学科仪器，通过共同的方法实现TUM研究领域和站点之间的新互动和合作。

The FIB-SEM (Focused Ion Beam Scanning Electron Microscope) is to be integrated into the newly created EM Facility at TUM and used across disciplines (chemistry, physics, life sciences, medicine, battery and materials research) and across TUM sites (Garching, Munich, Weihenstephan, and Straubing) for multidisciplinary research into structure-function relationships in biological systems such as cells, tissues, and soil samples, as well as battery materials and metallic materials. Unfortunately, such an instrument is not currently available at TUM. The instrument uniquely enables the combination of tomography and electron microscopy on a variety of sample systems. With the FIB-SEM, it will be possible to perform tomography in addition to surface analysis. This opens up the three-dimensional measurement of complex sample systems. These include cells (human, animal, plant), tissues, and organoids, as well as soil microaggregates and composite systems (e.g., fungus-wood). The instrument also enables topographic characterization and functional testing of electrochemical and metallic materials.This wide range of applications places high demands on the system's technical components, flexibility, and robustness. The instrument will also play a central role in linking state-of-the-art imaging techniques through correlative image evaluation as an interface between the diverse light microscopic methods.The sequential milling function using FIB is essential for 3D imaging of objects. Also, it enables the preparation of thin lamellae, which can then be imaged at even higher resolution. Comparative light microscopy of the same objects can be used to preselect the target volume of interest to substantially increase efficiency. In addition, the distribution of different elements can be imaged. Thus, the proposed FIB-SEM instrument could provide an urgently needed multidisciplinary instrument for the TUM EM Facility, enabling new interactions and collaborations between TUM research fields and sites through the common methodology.