Electron-Beam Evaporator

超导电路是当今最有前途的构建量子信息处理系统和研究量子物理基础方面的平台之一。因此，学术界和工业界的大量研究工作旨在进一步了解和改善这些器件的性能。超导电路器件的制造依赖于大规模的技术基础设施，而这在德国只有极少数地方具备。位于埃尔兰根的弗里德里希-亚历山大大学现在已经开始成为量子技术的领先中心，特别是超导量子器件的发展。超导量子器件的制造使用沉积在衬底材料上的高质量超导薄膜，并使用微米和纳米级光刻和蚀刻技术对这些薄膜进行图案化。因此，材料的质量和它们之间的界面对于保持量子力学相干性至关重要。因此，我们在此申请的电子束蒸发器将成为实验物理系新成立的实验室的必要采购之一。它将使超导薄膜和约瑟夫森隧道结的制造成为可能，因此将是所有计划的研究活动的基本要求。

Superconducting circuits constitute one of today's most promising platforms to build quantum information processing systems and to study fundamental aspects of quantum physics. Considerable research efforts in both academia and industry therefore aim to further understand and improve the properties of these devices. The fabrication of superconducting circuit devices relies on large-scale technical infrastructure, which is only available in very few places in Germany. The Friedrich-Alexander University in Erlangen has now set out to become a leading center for quantum technology and for the development of superconducting quantum devices in particular. The fabrication of superconducting quantum devices uses superconducting thin-films desposited with high quality on a substrate material and patterns these films using micro- and nanoscale lithography and etching techniques. The quality of materials and the interfaces between them is thereby critical in order to preserve the quantum-mechanical coherence properties. The electron-beam evaporator which we hereby apply for will thus be one of the essential purchases of the newly established laboratory at the chair of experimental physics. It will enable the fabrication of superconducting thin-films and Josephson tunnel junctions and will therefore be an essential requirement for all of the planned research activities.