A developement of a new method to observe the direct image of surface atomic arrangements and a research of surface superlattice structures on semiconductors

本项目旨在研究由电子束或离子束辐射的晶体表面表面超结构的X射线。“applying”总反射角度X射线光谱（TRAXS）“which has discovered by ourselves.According to this purpose。我们建造了一些新的设备。例如，电子束TRAXS装置（1985年）、光电子干扰装置（1985年）、离子束TRAXS装置（1987年）、表面原子排列观察装置（1986年）等，我们首先研究了详细的现象和电子束TRAXS机制。作为一个结果，它是明确的，因为该方法有许多建议。例如：（1）：这是可能的，因为RHEED模式产生的一个区域的表面分析是可能的，（2）：表面分析是可能的，从0.01单原子层到10.000单原子层。（3）这是有可能衡量吸收率不符合增长模式的数量。（4）这是有可能控制探测层的深度。（五）：It is possible to study elementary analysis and the structure analysis at the interfaces inside the crystals.Considering the above advantages and others.我们为表面结构分析开发了新的方法。这就是为什么。electron-beam TRAXS。离子束AES和离子束TRAXS。During Photoelectron Diffraction Studies。我们发明了一种新型的电子能量分析仪。这是有可能观察到直接在2的大实心角度内的两个维度强度分布。由于电子从一点的表面发射出来，并具有相同的能量。我们构建了一个新的设备来观察表面原子排列。电子束的直径约为5 A，并在1.7 x10 -10托的超高真空中操作。目前所获得的分辨率约为1.4 A。

This project intend to study the furface superstructures by detecting X-rays emitted from crystal surfaces irradiated by an electron beam or an ion beam. applying "total reflection angle X-ray spectroscopy (TRAXS)" which has discovered by ourselves.According to this purpose. we constructed some new apparatus. such as an electron-beam TRAXS apparatus (1985), a photoelectron-diffraction apparatus (1985), an ion-beam TRAXS apparatus (1987), an apparatus for observation of surface atomic arrangements (1986) etc. We studied at first in detail the phenomena and mechanism of electron-beam TRAXS. As a result, it was clarified that the method have many advantages. such as (1):It is possible that the surface analysis of an area from where the RHEED pattern is produced,(2):Surface analysis is possible for the adsorbate ranging from 0.01 monoatomic layer to 10.000 monoatomic layers. (3):It is possible to measure the amount of the adsorbates irrespective of the growth modes. (4):It is possible to control the depth of the detection layers. (5):It is possible to study elementary analysis and the structure analysis at the interfaces inside the crystals.Considering the above advantages and others. we developed new methods for surface structure analysis. such as. electron-beam TRAXS. ion-beam AES and ion-beam TRAXS. During photoelectron diffraction studies. we invented a new type electron energy analyzer. It is possible to observe directly the two-dimensional intensity distribution within the large solid angle of 2 . for the electrons emitted from a point of surface and having the same energy. We constructed a new apparatus for observation of surface atomic arrangement. in which the diameter of the electron beam is about 5A and operated in an ultra high vacuum of 1.7x10-10 Torr. Obtained resolution was about 1.4 A゜ at present.