Study on Development of the Precise Automatic Micromanufacturing System for the Microparts made of a Ultrathin Leaf.

本研究对精密微零件制造系统中微机械装置的研制问题进行了分析和实验研究。其中一种机构是微操作和进给装置，例如由具有刚性关节的挂钩双压电片组成的柔性手指。另一种是基于杠杆和摆动关节组合机构的微驱动机构，该机构由4个弹性关节连接的双压电片和2个多层压电致动器组成。该执行器可用于精密工作、冲孔、锤击和冲压，或用于微小零件的抽筋，以实现精确定位。它具有许多优点，例如，通过分别施加独立电压的压电件的弯曲，具有可变的输出力-位移特性。得到的结果如下：1)微型夹持和馈送装置(A)馈送和搬运能力对其附着姿态影响不大，从而可以实现系统的柔性构成。(B)当固定件的轴向接近馈送方向时，馈送力增加，馈送距离减小。(C)当自由件垂直于馈送平面接近时，最大自由移动距离和进给距离增加。2)微执行机构(A)杠杆构件的安装角度可以设置为90ﾟ。(B)存在施加电压的最佳极点组合，作用在杠杆构件上的弯矩使主执行器的输入点回到初始位置。在拨动连接件中产生的力矩会促进弯曲。(C)存在一个最佳电压，在该电压中不会引起输入点的位移。微型系统越来越具有实现的可能性。

This research analytically and experimentally deals with the problem on development of micromechanical devices in the precision microparts manufacturing system. One of the mechanisms is the microhandling and feeding device such as a flexible finger constituted by a hooked bimorph type piezoelectric member with a rigid joint. The another one is the microactuating mechanism based on a lever and toggle-joint combination mechanism which is constituted by bimorph type piezo members connected by 4 elastic joints and 2 multilayer type piezo actuators. The actuator is available to precision workings, punching, hammering and press, or cramp of microparts for precision positioning. There are many merits, for example, it has variable output force-displacement characteristics by bending of the piezo members which are applied the independent voltage, respectively.The results obtained are as follows :1) Microhadling and feeding devices(a) Feeding and handling abilities are not influenced very much to its attaching posture, then a flexible constitution of the system is realizable.(b) When the axial direction of the fixed member approaches the feeding direction, the feeding force increases and the feeding distance decreases.(c) When the free member approaches perpendicularly to the feeding plane, the maximum free moved distance and the feeding distance increase.2) Micro actuating mechanism(a) The attaching angle of the lever member is available to set 90ﾟ.(b) There is the optimum pole combination of the applied voltages, The bending moment acted in the lever member makes to return the input point of the main actuator to the original position. The moment generated in the toggle-joint member makes to boost the bending.(c) There is the optimum voltage in which displacement of the input point does not cause. The miniature system is more and more realizable.