Microactuator by Photofabrication

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Frexibly moving mechanical systems which have many components as living things are being studied. Microactuators for such purposes have been developed by micromachining. Following results were obtained.1. Distributed electrostatic microactuators. (References 1-5)A distributed electrostatic micro actuator (DEMA) was proposed. The DEMA has man yserially connected driving units which consist of two wave-like electrodes facing each other. Large electrostatic force and large displacement can be obtained by narrowing the gap and by serially connecting many driving units. The structure was fabricated by photolithography and cupper electroplating.2. Three-dimensional microfabrication in batch process. (References 6-12)For practically applicable DEMA three-dimensional microfabrication methods have to be developed. Cryogenic deep reactive ion ethching was developed to etch a silicon wafer and a polyimide film through their thicknesses. Projection laser CVD using low temperature condensation method was also developed.3. Integrated sensor and actuator systems. (References 13-45)Packaged micro systems in which not only sensors and circuits but also actuators are integrated can have valuable features. Electrostatic force-balancing accelerometers, resonant infrared sensors, optical scanners and fluid control systems were developed.4. Flexibly moving systems which has many microactuators. (References 46-51)Active catheter which moves like a snake was fabricated using silicon micromachining and shape memory coil actuators. The outer diameter of the catheter tube is 2.8mm. Related processes as nonplaner patterning on the catheter tube and micro assmbly using CW UV laser assisted polymer deposition were deposition.5. Control of flexible machines which have many microactuators. (References 52-60)Motion controls of flexible, parallel or cooperative robots were studied.