Microactuator by Photofabrication

光加工微致动器

• 批准号: 03102001
• 负责人: ESASHI Masayoshi
• 金额: $ 148.48万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Specially Promoted Research
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03102001/
• 关键词: Microactuator; Photofabrication; Micromachining; Electrostatic Actuator; Three-dimentional Microfabrication; Electrostatic Servo; Active Catheter; Flexible Manipulator; フォトファブリケーション; マイクロマシーニング; 3次元立体加工; ビーム加工技術; フォトファブリーケション; 静電駆動; 反応性イオンエッ

Frexibly moving mechanical systems which have many components as living things are being studied. Microactuators for such purposes have been developed by micromachining. Following results were obtained.1. Distributed electrostatic microactuators. (References 1-5)A distributed electrostatic micro actuator (DEMA) was proposed. The DEMA has man yserially connected driving units which consist of two wave-like electrodes facing each other. Large electrostatic force and large displacement can be obtained by narrowing the gap and by serially connecting many driving units. The structure was fabricated by photolithography and cupper electroplating.2. Three-dimensional microfabrication in batch process. (References 6-12)For practically applicable DEMA three-dimensional microfabrication methods have to be developed. Cryogenic deep reactive ion ethching was developed to etch a silicon wafer and a polyimide film through their thicknesses. Projection laser CVD using low temperature condensation method was also developed.3. Integrated sensor and actuator systems. (References 13-45)Packaged micro systems in which not only sensors and circuits but also actuators are integrated can have valuable features. Electrostatic force-balancing accelerometers, resonant infrared sensors, optical scanners and fluid control systems were developed.4. Flexibly moving systems which has many microactuators. (References 46-51)Active catheter which moves like a snake was fabricated using silicon micromachining and shape memory coil actuators. The outer diameter of the catheter tube is 2.8mm. Related processes as nonplaner patterning on the catheter tube and micro assmbly using CW UV laser assisted polymer deposition were deposition.5. Control of flexible machines which have many microactuators. (References 52-60)Motion controls of flexible, parallel or cooperative robots were studied.

人们正在研究由许多生物组成的可自由运动的机械系统。用于这种目的的微致动器已经通过微机械加工开发出来。主要研究结果如下：1.分布式静电微执行器。（参考文献1-5）提出了一种分布式静电微致动器（DEMA）。DEMA具有多个串联的驱动单元，其由两个彼此面对的波形电极组成。通过缩小差距和串联多个驱动单元可以获得大的静电力和大的位移。该结构采用光刻和电镀铜工艺制作.批处理三维微细加工。（参考文献6-12）为了实际应用，必须开发DEMA三维微加工方法。采用低温深反应离子刻蚀技术对硅片和聚酰亚胺薄膜进行了全厚度刻蚀。开发了低温冷凝投影激光化学气相沉积技术.集成传感器和执行器系统。（参考文献13-45）封装的微型系统，其中不仅集成了传感器和电路，而且还集成了致动器，可以具有有价值的特征。研制了静电力平衡加速度计、谐振式红外传感器、光学扫描仪和流体控制系统.具有许多微致动器的复杂运动系统。（参考文献46-51）使用硅微机械加工和形状记忆线圈致动器制造像蛇一样移动的有源导管。导管的外径为2.8 mm。使用连续紫外激光辅助聚合物沉积在导管和微组件上进行非平面图案化等相关工艺。5.具有许多微致动器的柔性机器的控制。（参考文献52-60）研究了柔性、并联或协作机器人的运动控制。

项目成果

M.Esashi,: "High-rate Directional Deep Dry Etching for Bulk Silicon Micromachining" Journal of Micromechanics and Microengineering,5,1. 1-6 (1995)

M.Esashi，：“体硅微加工的高速定向深度干蚀刻”微机械与微工程杂志，5,1。

林根培: "能動カテーテルと分布型アクチュエータ" 計測自動制御学会 第6回自律分散 システム・シンポジウム. 6. 109-114 (1995)

Nei Hayashi：“主动导管和分布式执行器”仪器与控制工程师学会第六届自主分布式系统研讨会。6. 109-114 (1995)。

江刺正喜: "光マイクロ加工" 第55回応用物理学会学術講演会. 55. 1206 (1994)

Masaki Esashi：“光学微加工”第 55 届日本应用物理学会年会 55. 1206 (1994)。

内山勝: "単機能マイクロロボット群による物体操作" 第12回日本ロボット学会学術講演会. 12. 549-550 (1994)

Masaru Uchiyama：“一组单功能微型机器人的物体操纵”日本机器人学会第十二届学术会议 12. 549-550 (1994)。

K.Murakami,Y.Wakabayashi.K.Minami,M.Esashi: "Cryogenic Dry Etching for High Aspect Ratio Microstructures" Proc.of IEEE Micro Electro Mechanical Systems.(Florida. USA). 65-70 (1993)

K.Murakami,Y.Wakabayashi.K.Minami,M.Esashi：“高深宽比微结构的低温干法蚀刻”Proc.of IEEE Micro Electro Mechanical Systems。（佛罗里达州，美国）。