Microactuator by Photofabrication

光加工微致动器

基本信息

批准号：
03102001
负责人：
ESASHI Masayoshi
金额：
$ 148.48万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Specially Promoted Research
财政年份：
1991
资助国家：
日本
起止时间：
1991 至 1994
项目状态：
已结题

项目摘要

Frexibly moving mechanical systems which have many components as living things are being studied. Microactuators for such purposes have been developed by micromachining. Following results were obtained.1. Distributed electrostatic microactuators. (References 1-5)A distributed electrostatic micro actuator (DEMA) was proposed. The DEMA has man yserially connected driving units which consist of two wave-like electrodes facing each other. Large electrostatic force and large displacement can be obtained by narrowing the gap and by serially connecting many driving units. The structure was fabricated by photolithography and cupper electroplating.2. Three-dimensional microfabrication in batch process. (References 6-12)For practically applicable DEMA three-dimensional microfabrication methods have to be developed. Cryogenic deep reactive ion ethching was developed to etch a silicon wafer and a polyimide film through their thicknesses. Projection laser CVD using low temperature condensation method was also developed.3. Integrated sensor and actuator systems. (References 13-45)Packaged micro systems in which not only sensors and circuits but also actuators are integrated can have valuable features. Electrostatic force-balancing accelerometers, resonant infrared sensors, optical scanners and fluid control systems were developed.4. Flexibly moving systems which has many microactuators. (References 46-51)Active catheter which moves like a snake was fabricated using silicon micromachining and shape memory coil actuators. The outer diameter of the catheter tube is 2.8mm. Related processes as nonplaner patterning on the catheter tube and micro assmbly using CW UV laser assisted polymer deposition were deposition.5. Control of flexible machines which have many microactuators. (References 52-60)Motion controls of flexible, parallel or cooperative robots were studied.

在研究生物时，具有许多组件的机械系统易怒。微加工已经开发出了微型抗药酶。获得以下结果。1。分布式静电显微散热器。（参考文献1-5）提出了分布式静电微执行器（DEMA）。 DEMA具有型号连接的驾驶单元，由两个波浪状的电极组成。可以通过缩小差距和连接许多驾驶单元的差异来获得大型静电力和较大的位移。该结构是通过光刻和电镀构造的2。批处理过程中的三维微分化。（参考文献6-12）对于实际适用的DEMA，必须开发出三维微生物方法。低温深型反应离子醚是通过其厚度蚀刻硅晶片和聚酰亚胺膜的。还开发了使用低温冷凝法的投影激光CVD。3。集成的传感器和执行器系统。（参考文献13-45）包装的微型系统，其中不仅传感器和电路，而且还集成了执行器都可以具有宝贵的功能。开发了静电力平衡加速度计，谐振红外传感器，光学扫描仪和流体控制系统。4。具有许多显微活性器的灵活移动系统。（参考文献46-51）使用硅微加工和形状记忆线圈执行器制造的活性导管，其运动像蛇一样移动。导管管的外径为2.8mm。使用CW紫外线激光辅助聚合物沉积在导管管上的非固定器图案和微观的相关过程是沉积。5。控制具有许多显微活性器的柔性机器。（参考文献52-60）研究了灵活，平行或合作机器人的运动控制。