Microactuator by Photofabrication

人们正在研究具有许多生物组成部分的可灵活移动的机械系统。微致动器是通过微机械加工开发出来的。实验结果如下：分布式静电微致动器。（文献1-5）提出了分布式静电微致动器（DEMA）。DEMA具有连续连接的驱动单元，驱动单元由两个相互面向的波浪状电极组成。通过缩小间隙和将多个驱动单元串联，可以获得大的静电力和大的位移。该结构采用光刻和镀铜制备。批量加工中的三维微加工。（参考文献6-12）为了实际适用的DEMA，必须开发三维微加工方法。采用低温深度反应离子刻蚀技术，对硅片和聚酰亚胺薄膜进行刻蚀。采用低温冷凝法的投影激光CVD也得到了发展。集成传感器和执行器系统。（参考文献13-45）不仅集成了传感器和电路，还集成了执行器的封装微系统具有有价值的特性。静电力平衡加速度计、谐振红外传感器、光学扫描仪和流体控制系统得到了发展。具有许多微致动器的灵活运动系统。（参考文献46-51）利用硅微机械加工和形状记忆线圈驱动器制造了像蛇一样移动的主动导管。导管外径2.8mm。研究了连续波紫外激光辅助聚合物沉积的相关工艺，如导管上的非平面图像化和微组装。具有多个微致动器的柔性机械的控制。（文献52-60）研究了柔性机器人、并联机器人和协作机器人的运动控制。

Frexibly moving mechanical systems which have many components as living things are being studied. Microactuators for such purposes have been developed by micromachining. Following results were obtained.1. Distributed electrostatic microactuators. (References 1-5)A distributed electrostatic micro actuator (DEMA) was proposed. The DEMA has man yserially connected driving units which consist of two wave-like electrodes facing each other. Large electrostatic force and large displacement can be obtained by narrowing the gap and by serially connecting many driving units. The structure was fabricated by photolithography and cupper electroplating.2. Three-dimensional microfabrication in batch process. (References 6-12)For practically applicable DEMA three-dimensional microfabrication methods have to be developed. Cryogenic deep reactive ion ethching was developed to etch a silicon wafer and a polyimide film through their thicknesses. Projection laser CVD using low temperature condensation method was also developed.3. Integrated sensor and actuator systems. (References 13-45)Packaged micro systems in which not only sensors and circuits but also actuators are integrated can have valuable features. Electrostatic force-balancing accelerometers, resonant infrared sensors, optical scanners and fluid control systems were developed.4. Flexibly moving systems which has many microactuators. (References 46-51)Active catheter which moves like a snake was fabricated using silicon micromachining and shape memory coil actuators. The outer diameter of the catheter tube is 2.8mm. Related processes as nonplaner patterning on the catheter tube and micro assmbly using CW UV laser assisted polymer deposition were deposition.5. Control of flexible machines which have many microactuators. (References 52-60)Motion controls of flexible, parallel or cooperative robots were studied.