Integrated Microactuator Systems Emphasizing Ni-Mn-Ga Films with a Tailored Microstructure INTACT - Design and System Integration of Microactuators with Discrete and Thin-Film MSM Elements

这个子项目是一揽子计划的一部分，该计划的目标是利用磁性形状记忆(MSM)合金的磁感应长度变化来开发微执行器。这些材料实现了高达10%的长度变化，为在薄膜技术中制造紧凑型微执行器开辟了机会，特别是在应用MSM薄膜的情况下。所从事的任务是混合和集成的MSM微执行器的设计和建模，以及制造励磁部件的技术研究和开发工作，如用于磁通产生的微线圈和永磁体，以及用于引导磁通的软磁微结构。此外，将制作混合薄膜微驱动器，即利用离散MSM元件的驱动器，并对其进行评估。这项活动的目的是在MSM薄膜还没有提供的情况下，已经获得了MSM微执行器的经验。

This sub-project is part of a package proposal that has the objective to develop microactuators utilizing the magnetically induced change of length in magnetic shape memory(MSM) alloys. These materials achieve a length change of up to 10%, opening up anopportunity for creating compact micro actuators in thin-film technology, particularly if MSMthin-films are applied. Tasks pursued are the design as well as the modeling of hybrid andintegrated MSM micro actuators and research and development work on technologies forfabricating excitation components, like microcoils and permanent magnets for magnetic fluxgeneration and soft magnetic microstructures for guiding the flux. Furthermore, the hybridthin-film micro actuator, i.e. the one utilizing discrete MSM elements, will be fabricated andsubjected to an evaluation. This activity is aimed at already gaining experience with MSMmicro actuators while MSM thin-films are not yet available.