Integrated Microactuator Systems Emphasizing Ni-Mn-Ga Films with a Tailored Microstructure INTACT - Design and System Integration of Microactuators with Discrete and Thin-Film MSM Elements

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This sub-project is part of a package proposal that has the objective to develop microactuators utilizing the magnetically induced change of length in magnetic shape memory(MSM) alloys. These materials achieve a length change of up to 10%, opening up anopportunity for creating compact micro actuators in thin-film technology, particularly if MSMthin-films are applied. Tasks pursued are the design as well as the modeling of hybrid andintegrated MSM micro actuators and research and development work on technologies forfabricating excitation components, like microcoils and permanent magnets for magnetic fluxgeneration and soft magnetic microstructures for guiding the flux. Furthermore, the hybridthin-film micro actuator, i.e. the one utilizing discrete MSM elements, will be fabricated andsubjected to an evaluation. This activity is aimed at already gaining experience with MSMmicro actuators while MSM thin-films are not yet available.