Study of Nanometer Accuracy Positioning in Consideration of Feed Element and Guide Elements

1. 进给元件(1)滚珠丝杠：获得了有关螺母预紧力控制的基本数据，并将其应用于实际机器（S.Fukada）。(2)摩擦驱动：明确了驱动点上的非线性弹性特性沿工作台运动方向变化的原因（J.Otsuka）。通过对定位仪的仿真，建立了定位仪的设计方法（H.Shimizu）。(1)滚动导轨：明确了几种滚动导轨的定位特点（m.i izawa）。分析了轨道不对准时工作台的倾斜运动和摩擦变化（S.Shimizu）。(2)静压空气轴承：双限位轴承是新开发的轴承，其实验和理论结果表明，它可以非常有效地获得无限刚度（S.Togo和O.Saito）。2 .制造了亚间隙轴承，并对其动态特性进行了研究（S.Yoshimoto）。3 .平行弹簧的特性明确了附加在平行弹簧上的位移放大机构（yoshimura）。对于衍射云纹传感器，建立了软硬结合的优化设计方法，以确定精确的角度位置（y.u uchida）。将传感器融合应用于车床，可以获得有效的结果，获得良好的表面和轮廓（M.Shiraishi）。在上述研究结果的基础上，研制了几种新型定位装置，实现了定位精度低于0.1 μ m （100nm）的高精度超精密定位；研究了气动驱动电机的定位特性（y.u uchida）。实验表明，在工作台运动过程中，对无位置传感器的工作台加速度进行双积分，可以实现粗糙定位（S.Fukada）。端面车床转台的精确倾斜控制在传感器分辨率范围内（y.a aoyama）。在超精密平面磨床上制造了可获得数nm切削深度和10nm表面平整度的微位移工作台，可获得5nm位移分辨率、无限刚度和80 Hz频率带宽（K.Furutani和j.t otsuka）。由滚珠丝杠和滚珠直线导轨组成的开环式定位系统可获得0.1 μ m的定位分辨率（S.Shimizu）。少

1. Feed Elements(1)Ball screws : Fundamental data, concerning the nut preload control, were abtained and applied to a practical machine (S.Fukada). (2)Friction drive : The reason became clear why the nonlinear elastic characteristic on the driving point varied along the table movement (J.Otsuka). By the simulation of the positioning appratus, the designing method was established (H.Shimizu).2. Guide elements(1)Rolling guides : The positioning charasteristics were made clear about several kinds of rolling guide (M.Izawa). When the railway had misalignment, the table tilting motion and friction change was analyzed (S.Shimizu).(2)Hydrostatic air bearing : The bearing with double restristors was newly developed and its experimental and theoretical results showed that it was very effective to obtain infinite stiffness (S.Togo and O.Saito). The bearing with sub-mum clearance was manufactured and its dynamic characteristics were studied (S.Yoshimoto).3. Parallel springsThe characteristics of … More displacement magnification mechanism attached to the parallel springs were made clear (Y.Yoshimura).4. SensingAs for the diffraction moire sensor, an optimal design using soft and hard methods was established for settling a precise angular position (Y.Uchida). By applying the sensor fusion to the lathe, effective results could be obtained to get good surface and contour (M.Shiraishi).5. Positioning below 100nm accuracyOn the foundation of the above results, the new several positioning apparatuses were developed and high performance for ultraprecision positioning could be achieved with the positioning accuracy below 0.1mum (100nm) ; The positioning characteristics of the aerodynamic drive motor was studied (Y.Uchida). The experiment showed that double integration of the table acceleration without position sensor during table movement was capable of rough positioning (S.Fukada). Precise tilting of the rotating table for the facing lathe be controlled within the sensor resolution (Y.Aoyama). The minute-displacement table to obtain several nm cutting depth and 10nm surface flatness to grind the brittle materials was manufactured for the ultraprecision surface grinder, which could give 5nm displacement resolution, infinite stiffness and frequency bandwidth of 80 Hz (K.Furutani and J.Otsuka). An open-loop type positioning system a ball screw and ball linear guide could gain 0.1mum positioning resolution (S.Shimizu). Less