Development of High Precision Fast Light Deflectors Utilizing Inverted Domains of Lithium Niobate Single Crystals.

本研究计画的目的是利用铌酸锂的反转畴结构，提出一种无键合层的单晶片光偏转器，并开发出响应速度快、扫描范围宽、结构紧凑、高精度的光偏转器。本项目取得的主要成果如下：1.发现适合于在具有反转畴层的板中有效地仅产生扭转运动而不引起弯曲运动的最佳切割是148 °旋转的Y切割板，其较长侧从Z '轴倾斜52 °。2. LiNbO_3的横向压电应变常数和耦合因子的温度依赖性在-100 °C到+150 °C的范围内进行了测量，并被证明是相当小的相比，压电陶瓷3。从理论上分析了扭振器的静态变形和共振现象，提出了实现宽扫描范围和快速响应的设计原则， ...更多信息 如既定。4.研究了形成反畴层的热处理条件、光偏转器的支撑方法、电击穿对策和振动阻尼方法，确定了光偏转器的制造工艺。5.实验表明，用140 °旋转Y切LiNbO_3片制作的光偏转器具有良好的线性度，无迟滞现象。通过施加（] SY.+-]）的电压，获得了大至25 μ m的光扫描范围。1.5 kV至尺寸为17 * 5 * 0.1 mm ^[3.6]的光偏转器。当以谐振频率驱动尺寸为7.5 * 3 * 0.1 mm^3的小尺寸偏转器时，在16 V的低交流电压下获得了20 μ m的较大扫描范围。<p-p>提出了一种由光偏转器和法布里-珀罗标准具组成的用于波分复用光通信系统的可调谐滤波器，并证明了该滤波器具有窄带（0.15nm）可调谐特性。少

The purpose of this research project is to propose light deflectors consisting of a single crystal plate with no bonding layr by utilizing inverted domains of LiNbO_3 and to develop comact high precision light deflectors with a quick response and a wide scanning range. The results obtained in this project are summarized as follows : 1. The optimal cut suitable for generating only torsional motion efficiently without causing bending motion in a plate with an inverted domain layr was found to be the 148ﾟ rotated Y-cut plate with the longer side tilted 52ﾟ from the Z' axis. 2. The temperature dependences of the transverse piezoelectric strain constant and coupling factor of LiNbO_3 were measured in the range from-100ﾟto+150ﾟC and were shown to be considerably small compared to those of piezoelectric ceramics 3. The static deformation and resonant vibration of the torsional actuator were theoretically analyzed and the design guideline for attaining wide scannning range and quick response w … More as established. 4. The heat treatment conditions for forming an inverted domain layr, methods for supporting light deflectors, countermeasures for electrical breakdown, and vibration damping methods were examined and the fabrication process of light deflectors was established. 5. It was experimentally shown that a light deflector fabricated using a 140ﾟ rotated Y-cut LiNbO_3 plate had an excellent linearity and no hysteresis. A light scanning range as large as 25ﾟ was attained by application of a voltage of (]SY.+-.])1.5 kV to a light deflector with dimensions of 17*5*0.1 mm^3.6. When a small-size deflector with dimensions of 7.5*3*0.1 mm^3 was driven at the resonant frequency, a larger scanning range of 20ﾟ was attained with a low ac voltage of 16 V_<p-p>.7. A tunable optical filter consisting of the light deflector and a Fabry-Perot etalon was proposed for wavelength division multiplexed optical communication systems and was demonstrated to have narrowband (0.15nm) tunable characteristics. Less