Development of the glancing-incidence and glancing-takeoff X-ray fluorescence apparatus for surface an analysis

与一些公司的研究人员合作，研制了一种掠入射和掠射起飞的X射线分析仪。这台仪器有一个W/C多层的单色计。用精密测角仪将初级X射线的入射角(Phi)和荧光X射线的起始角(Chi)控制在全反射临界角(几个mrad)附近。此外，利用2hita圆台可以改变入射X射线束与被检测荧光x射线束之间的方位角，而利用Rheta圆台也可以旋转样品台。这4个阶段(Phi，chi，Rheta，2hita)是由计算机控制的步进电机，计算机也测量X射线光谱。利用该装置对不同材料的表面进行了分析。研究成果发表在国际期刊上约20篇论文上，并在包括两次国际会议在内的科学学会上作了口头介绍。特别是在全反射条件下，固体表面密度的测定和X射线探测深度的估算都取得了较好的效果。首席研究员(K.Tsuji)获得了日本表面科学学会和日本应用物理学会的两项奖励。本文尝试将掠入射和掠取X射线荧光法应用于等离子体过程的监测，并首次研究了格林辉光放电灯的X射线激励STM针尖电流和X射线发射。

A glancing-incidence and glancing-takeoff x-ray analytical apparatus was developed in cooperation with researchers of companies. This apparatus have a monocrometer of W/C multilayr. Both the incident angle (phi) of the primary x-rays and the takeoff angle (chi) of the fluorescent x-rays are controlled around the critical angles of total reflection (several mrad) with precise goniometers. Moreover, the azimuth angle between the incident x-ray beam and the detected fluorescent x-ray beam can be changed with a 2rheta circle stage, and rotation of the sample stage is also possible with a rheta circle stage. The 4 stages (phi, chi, rheta, 2rheta) are stePPing-motor-controlled by a computer, which also measures the x-ray spectra. Therefore, the angle scan of the fluorescent x-ray intensity is automatically measured.We performed a surface analysis of various materials by using this apparatus. The obtained results were reported in about 20 papers of international Journals, and were orally presented at scientific societies including twice international meeting. Especially, the determination of the solid surface density and the evaluation of the x-ray probing depth under total reflection conditions are good results. The head investigator (K.Tsuji) is given two prizes for encouragement from The Surface Science Society of Japan and The Japan Society of Applied Physics. I attempt to apply the glancing-incidence and glancing-takeoff x-ray fluorescence method to monitoring the plasma processing.In addition to these results, we also studied the x-ray excited STM tip current and the x-ray emission from a Grimm glow discharge lamp for the first time.