DEVELOPMENT OF THE LASER ULTRASONIC MICROMANIPULATOR

非接触式和非破坏性的操作技术，如液体中微米级颗粒的运输、捕获和分离，目前在生物技术、微机械加工和微流体学领域引起了相当大的兴趣。我们已经开发了一种新型的激光超声微机械臂（LUMM），其中声辐射力和光辐射力作为互补的非接触力。在这项研究中，我们研究了在Windows PC上使用图形用户界面（GUI）的高性能LUMM以及液滴操作的可能性。本研究于2001年4月至2002年3月进行，为期2年。得到了以下结果和展望。1)为了提高实验LUMM的性能，在PC机上成功构建了基于Windows 98图形用户界面的显微镜图像捕获和机械台GPIB控制。然而，超声波功率和激光功率的GPIB控制将成为未来的问题。2)利用近年来电子领域关注的UV固化胶粘剂技术，实验制作了小形状楔形换能器作为超声波操纵的超声源。在5.48MHz工作频率下，获得了最小插入损耗为25.3dB、3dB带宽为9%的良好特性。3)成功地完成了利用楔形换能器从大量粒子中快速去除不需要的粒子而只捕获特定微米级粒子的实验。提高楔形换能器的工作频率，以减少换能器的输入功率，是今后需要解决的问题。4)近年来，人们注意到，作为化学过程组成部分的各种过程，如传递和反应、分离、纯化、检测等，都集成在几厘米大小的玻璃和塑料基板上，即所谓的芯片实验室（Lab-on-a-Chip， LOC）。要实现LOG，必须发展微流控技术，在不需要复杂的泵和管的情况下，控制极少量（0.5μl-60μl）的液滴。然后，假设集成到激光超声微机械臂（LUMM）中，测试了6MHz板波（Lamb波）对液滴的操纵。结果表明，该方法是可行的。部分研究结果发表在日本电气工程师学会第32届机电研讨会上。未发表的结果将在不久的将来公布。研究将在本研究结果的基础上继续进行。少

Noncontact and nondestructive techniques for manipulation, such as transportation, trapping, and separation of micron-sized particles in liquid, are currently of considerable interest in areas of biotechnology, micromachining and microfuidics. Previously we have developed a new laser ultrasonic micromanipulator (LUMM) in which the acoustic radiation force and optical radiation force are both used as complementary noncontact forces. In this study, we have studied a high performance LUMM using a graphical user interface (GUI) on a Windows PC and the possibility of the liquid droplet to manipulation. This study was carried out for 2 years from April, 2001 by March, 2002. The following results and prospects were obtained.1) For the purpose of the performance enhancement of the experimental LUMM, capturing of the microscope image and GPIB control of the mechanical stage using GUI on Windows 98 in a PC were constructed successfully. However, the GPIB control of ultrasonic power and laser pow … More er became future problem.2) Using UV curing adhesive technology noticed in the electronic field recently, the wedge transducer of the small shape as ultrasonic source of the ultrasonic wave manipulation was produced experimentally. At the 5.48MHz operating frequency, the good characteristic of minimum insertion loss of 25.3dB and 3dB bandwidth of 9% was obtained.3) The experiment of trapping only the specific microns-sized particle by the removal of unnecessary particles using the wedge transducer from large number of particle quickly was carried out successfully. It is future problem to increase the operating frequency of the wedge transducer in order to reduce the electrical input power to the transducer.4) Recently, various processes such as transport and reaction, separation, purification, detection that are an element of the chemical process are integrated on glass and plastic substrate of several centimeter sizes are noticed, and so called Lab-on-a-Chip (LOC). It is indispensable to develop microfluidic technology which manipulates liquid droplet of a very small quantity (0.5μl-60μl) without requiring complicated pump and tube in order to realize LOG. Then, the manipulation of the droplet using plate wave (Lamb wave) of the 6MHz was tested assuming the integration to laser ultrasonic wave micromanipulator (LUMM). The result showed that the manipulation was possible.The part of these results was presented in the Inst. of Electrical Engineers of Japan 32nd EM symposium. The unpublished results will be presented in near future. The research will be continued on the basis of the result obtained through this study. Less