LASER ULTRASONIC MICROMANIPULATION

在本研究中，我们研究了一种利用声辐射力和光辐射力作为非接触力互补的高性能激光超声微操作器(Lumm)，以及用于液滴加工的超声微操作。本研究从2003年4月至2004年3月进行了为期两年的研究。1)在压电衬底上的单向叉指电极上激发了板波(兰姆波)。2)利用6 MHz频段的兰姆波激励压电基板，对液滴进行了一维输运实验，考察了其在微流体中应用的可能性。3)利用紫外光粘接技术在玻璃基板上放置了12个楔形换能器，实验制作了该结构的机械手。在声表面波频率5.6 MHz，换能器输入功率37dBm下，成功地实现了在玻璃基板上XY方向输送约7ml蒸馏水滴的二维操纵实验。4)利用视觉反馈控制实现了对液滴的二维操纵。5)检测了操纵过程中液滴的温升。实验结果表明，在50 MHz频段上的温升低于已报道的实验结果，其中部分结果在INST中给出。日本电气工程师协会第32届EM研讨会。并已于2005年9月在荷兰举行的IEEE超声波研讨会上提交。本研究将在本次研究成果的基础上继续进行。

In this study, we have studied a high performance laser ultrasonic micromanipulator (LUMM), in which the acoustic radiation force and optical radiation force are both used as complementary noncontact forces, and ultrasonic micromanipulation for use in liquid droplet processing. This study was carried out for 2 years from April, 2003 by March, 2004. The following results and prospects were obtained.1) The plate wave ( Lamb wave ) was excited in unidirectional interdigital electrode on piezoelectric substrate. The possibility of a realization of the manipulation which used radiation force of the plate wave and radiation force of laser beam complementarily was examined.2) One-dimensional transport experiment of the liquid droplet was carried out using the Lamb wave of the 6MHz band excited on piezoelectric substrate, and the application possibility to microfluidics was examined.3) The manipulator of the structure which placed 12 wedge type transducers on glass substrates using UV adhesive technology was produced experimentally. At 5.6MHz frequency of the SAW and input power 37dBm of the transducer, it succeeded in the experiment on the two-dimensional manipulation which transports distilled water droplet of about 7ml on glass substrates in the xy direction.4) Two-dimensional manipulation of the liquid droplet using the visual feedback control has been successfully achieved.5) The temperature rise of the droplet in the manipulation was examined. The experimental result showed that temperature rise was lower than the experiment on 50MHz band already reported.The part of these results was presented in the Inst. of Electrical Engineers of Japan 32nd EM symposium. And, it has submitted in IEEE Ultrasonics Symposium held in the Netherlands in September, 2005. The research will be continued on the basis of the result obtained through this study.