Nano-chemical modification of diamond surfaces by a probing method in controlled atmosphere

利用扫描探针显微镜研究了电流诱导化学修饰金刚石的表面终止。分析了氢封端和氧封端在高真空条件下的稳定性。通过对微波等离子体化学气相沉积过程中的原位等离子体分析，讨论了金刚石成核和氢终止的条件。氢终止引起的表面导电层经隧穿电流处理后转变为绝缘层。

Scanning probe microscopy was utilized for controlling the surface termination of diamond by current-induced chemical modification. Stabilities of hydrogen- and oxygentermination were analyzed in ultrahigh vacuum. Conditions for diamond nucleation and hydrogen termination were discussed on the basis of in-situ plasma analyses in microwave plasma chemical vapor deposition. Surface electric conduction layer caused by hydrogen termination was converted to insulating layer after treatment by tunneling current.