Development of high sensitivity non-radiation defect characterization systems for diamond semiconductor

本工作的目的是开发一种用于宽间隙半导体材料，特别是金刚石晶体的非辐射缺陷表征系统。利用压电器件的高灵敏度信号探测器开发了变温（80~400K）光热光谱，并对高压/高温合成金刚石晶体和微波等离子体化学气相沉积法生长的自立同外延金刚石薄膜进行了缺陷表征。

The purpose of this work is to develop a non-radiative defect characterization system for wide-gap semiconductor materials, especially diamond crystal. I have developed a temperature-variable(80～400K) photothermal spectroscopy using a high-sensitive signal detector with a piezoelectric device, and carried out the defect characterization of a high-pressure/ high-temperature synthesized diamond crystal and a self-standing homoepitaxial diamond film grown by a micro-wave plasma chemical vapor deposition method.