Materials World Network: LIGA Ni-base superalloys for MEMS applications

这项提案涉及的智力挑战涉及建立一个基于科学的协议，以优化加工和热处理路线，以生产一种新型的MEMS材料(电沉积镍基高温合金)，这种材料将极大地改善电沉积LIGA材料的功能并扩大其温度能力。一个合作的国际研究小组准备承担这项任务。该小组要解决的主要科学问题包括：(I)控制和优化电沉积参数，以将纳米Al颗粒均匀地缠绕在ED-Ni微构件中，(Ii)制定将沉积的绿色复合材料转变为γ-γ高温合金组织所需的热处理制度，以及(Iii)对所产生的微观组织和相应的机械性能进行表征。研究小组的密切合作将允许优化工艺流程，并创造出适用于MEMS应用的新型高温LIGA ED镍基高温合金。两个机构之间的密切合作将需要完成该提案的科学使命，研究生和高级研究人员科学家的综合交流将为这种合作创造工具，并为学生提供独特的教育体验。

The intellectual challenge addressed in this proposal involves the establishment of a sciencebased protocol for optimizing processing and heat treatment routes to produce a new class of MEMS materials (electrodeposited Ni-base superalloys) that will dramatically improve the functionality and expand the temperature capability of electrodeposited LIGA materials. A collaborative international research team is prepared to undertake this task. Overarching scientific issues to be addressed by this team include: (i) control and optimization of electrodeposition parameters to uniformly entrain Al nano-particles in ED Ni micro-components, (ii) development of heat treat schedules required to transform the as-deposited green composites into γ-γ’ superalloy microstructures, and (iii) characterization of the resultant microstructures and attendant mechanical properties. Close interaction of the research groups will allow for optimization of the process flow and result in the creation of novel high temperature LIGA ED Ni-base superalloys for MEMS applications. Close collaboration between the two institutions will be required to fulfill the scientific mission of the proposal, and integrated exchanges of graduate students and senior researcher scientists will create the vehicle for this collaboration and provide a unique educational experience for the students.