International Joint Research on Micromanipulation under Electron Microscope

在信息系统的开发、制造或基础研究领域，对微观物体的扫描电镜精确操作技术是十分必要的。在微力传感和基于扫描电镜图像的测量的基础上，提高操作的重复性和精度，以建立该技术。在计划这个项目时，东京大学已经开发出高分辨率的力感应技术。瑞士联邦理工学院（ETH）开发了基于图像处理的精确位移测量技术。因此，该项目的目标是东京大学和ETH将通过相互交流和共享知识和技术，建立SEM下微型物体的自动精确操作技术。Anquetil受ETH邀请到东京大学，开发了一种高分辨率力传感器，用于在扫描电镜下进行微观操作时的“原位”测量。将微位移测量技术与力传感器块相结合，实现了微位移传感器。力分辨率为46nN。测量范围为2O7uN。传感器块刚度为23N/m。由于开发的传感器同时具有高刚性和高分辨率，因此可以在微操作过程中对附着在传感器块上的工具施加的微力进行“原位”测量。从东京大学派往ETH的Saito通过将基于SEM图像的测量与力控制技术相结合，实现了一种可以对微物体进行高重复性和高精度操作的微操作系统。除了良好的操作系统性能外，高精度、可重复性地控制目标行为是实现精密微操作的重要条件。因此，本课题通过理论思考和系统实验，得出了基于微观物理的适当操作方法。此外，还演示了基于力和扫描电镜图像的集成控制实现多个微球的自动对准，以及微球阵列制造光子晶体。少

Precise manipulation technique of a micro object under SEM is much required in the field of the development and manufacture of information systems or the basic research. The repeatability and precision of the manipulation should be improved based on the microforce sensing and the SEM image-based measurement to establish the technique.When this project was planned, the University of Tokyo had developed the high-resolution force-sensing technique. Swiss Federal Institute of Technology (ETH) had developed the precise displacement measurement technique based on the image processing.Therefore the goal of this project was that the University of Tokyo and ETH would establish the automatic precise-manipulation technique of a micro object under SEM by exchanging and sharing the knowledge and technique with each other.Anquetil, who was invited from ETH to the University of Tokyo, has developed a highresolution force sensor for "in situ" measurement during the micro manipulation under SEM.The for … More ce sensor is realized by the combination of the micro displacement measurement technique and the force sensor block. The force resolution is 46nN.The range of the measurement is 2O7uN.The rigidity of the sensor block is 23N/m. Since developed sensor has both high rigidity and high resolution at the same time, it enables "in situ" measurement of the micro force acting on a tool attached to the sensor block during the micro manipulation.Saito, who was sent from the University of Tokyo to ETH, has realized a micro manipulation system which can operate a micro object with high repeatability and precision through the integration of the SEM image-based measurement and the force control technique. Besides the good performance of manipulation system, it is important for the precise micro manipulation to control the object behavior with high precision and repeatability. Thus in this project the appropriate manipulation method based on the micro physics was derived from the theoretical consideration and the systematic experiments. Additionally the automatic alignment of several micro spheres through the integrated control based on the force and the SEM image and the manufacture of photonic crystal by the array of micro spheres are demonstrated. Less